H10P 72/7626
Characterised by the construction of the shaft
Official title: {characterised by the construction of the shaft}
H10P72/7626 (Characterised by the construction of the shaft) appears on 842 US grants and 1,119 published applications in this corpus.
Search patents in H10P- Granted patents
- 842
- Published applications
- 1,119
- Assignees
- 227
- Inventors
- 2,093
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 2 | 0 |
| 1990 | 1 | 0 |
| 1991 | 4 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 7 | 0 |
| 1997 | 4 | 0 |
| 1998 | 6 | 0 |
| 1999 | 10 | 0 |
| 2000 | 14 | 0 |
| 2001 | 7 | 5 |
| 2002 | 22 | 20 |
| 2003 | 12 | 29 |
| 2004 | 26 | 24 |
| 2005 | 8 | 16 |
| 2006 | 13 | 24 |
| 2007 | 8 | 16 |
| 2008 | 7 | 37 |
| 2009 | 7 | 31 |
| 2010 | 18 | 31 |
| 2011 | 11 | 20 |
| 2012 | 28 | 34 |
| 2013 | 20 | 26 |
| 2014 | 21 | 34 |
| 2015 | 18 | 42 |
| 2016 | 27 | 49 |
| 2017 | 38 | 64 |
| 2018 | 47 | 54 |
| 2019 | 38 | 76 |
| 2020 | 58 | 87 |
| 2021 | 45 | 46 |
| 2022 | 58 | 103 |
| 2023 | 55 | 96 |
| 2024 | 80 | 54 |
| 2025 | 77 | 65 |
| 2026 | 35 | 36 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Substrate processing apparatus1 Sep 2026US 12,727,423 B2SCREEN Holdings Co., Ltd.
- Substrate processing apparatus1 Sep 2026US 12,727,439 B2Tokyo Electron Limited
- Substrate holder11 Aug 2026US 12,707,931 B2Niterra Co., Ltd.
- Semiconductor process device and wafer support structure thereof4 Aug 2026US 12,701,966 B2Beijing Naura Microelectronics Equipment Co., Ltd.
- Substrate support assemblies having internal shaft areas with isolated environments that mitigate oxidation7 Jul 2026US 12,677,639 B2APPLIED Materials.Inc.
- Ceramic heater8 Oct 2026US 2026/0314333 A1NGK Insulators, Ltd.
- Wafer transfer apparatus and semiconductor inspection device1 Oct 2026US 2026/0305259 A1Zhongke Jingyuan Electron Limited, Beijing (CN)
- Pedestal stem cooling system17 Sep 2026US 2026/0282803 A1Lam Research Corporation
- Wafer holder10 Sep 2026US 2026/0271673 A1
- Pedestal assembly27 Aug 2026US 2026/0255929 A1Lam Research Corporation
Most cited
By later US patents
- Susceptor drive and wafer displacement mechanism660US 5,421,893 AAPPLIED Materials.Inc. · 1995
- Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment622US 4,821,674 A1989
- Susceptor and baffle therefor558US 5,518,549 AMEMC Electronic Materials, Inc. · 1996
- Wafer support system539US 6,692,576 B2ASM America, Inc. · 2004
- Semiconductor fabrication apparatus and fabrication method thereof530US 6,503,562 B1APPLIED Materials.Inc. · 2003