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US 12,677,639 B2Granted
Substrate support assemblies having internal shaft areas with isolated environments that mitigate oxidation
AssigneeApplied Materials, Inc.
InventorVijay D. Parkhe
Life of this patent
Estimating the term…
Abstract
A substrate support assembly includes a shaft body, a plate attached to an upper portion of the shaft body, and a plug or cap attached to a lower portion of the shaft body. The shaft body, the plate and the plug or cap define an internal shaft area having an isolated environment. The internal shaft area is a vacuum environment or comprises an inert gas.
Claims20
A substrate support assembly comprising:
- a shaft body;
- a plate attached to an upper portion of the shaft body;
- a plug or cap brazed or welded to a lower portion of the shaft body;
- at least one component coupled to the plate and formed through the plug or cap;
- and
- at least one flexible connection that receives the at least one component;
- wherein the at least one flexible connection is a spring-like object that enables an adjustable length by expanding or contracting with respect to motion of the substrate support assembly;
- wherein the shaft body, the plate and the plug or cap define an internal shaft area having an isolated environment;
- and
- wherein the isolated environment is a vacuum environment.
7 more elements
A substrate support assembly comprising:
- a shaft body;
- a plate attached to an upper portion of the shaft body;
- a plug or cap brazed or welded to a lower portion of the shaft body;
- at least one component coupled to the plate and formed through the plug or cap;
- and
- at least one flexible connection that receives the at least one component;
- wherein the at least one flexible connection is a spring-like object that enables an adjustable length by expanding or contracting with respect to motion of the substrate support assembly;
- and
- wherein the shaft body, the plate and the plug or cap define an internal shaft area having an isolated environment.
6 more elements
A processing chamber comprising:
- a substrate support assembly, the substrate support assembly comprising:
- a shaft body;
- a plate attached to an upper portion of the shaft body;
- a plug or cap brazed or welded to a lower portion of the shaft body;
- at least one component coupled to the plate and formed through the plug or cap;
- and
- at least one flexible connection that receives the at least one component;
- wherein the at least one flexible connection is a spring-like object that enables an adjustable length by expanding or contracting with respect to motion of the substrate support assembly;
- wherein the shaft body, the plate and the plug or cap define an internal shaft area having an isolated environment;
- and
- wherein the isolated environment is a vacuum environment.
8 more elements
Dependencies are inferred from the claim text.