Pedestal assembly
AssigneeLam Research Corporation
InventorsMiguel Benjamin Vasquez, David French, Patrick G. Breiling, Jacob Lee Hiester
Life of this patent
Estimating the term…
Loading patent…
AssigneeLam Research Corporation
InventorsMiguel Benjamin Vasquez, David French, Patrick G. Breiling, Jacob Lee Hiester
Estimating the term…
A pedestal assembly is disclosed. In at least one implementation, pedestal assembly comprises a pedestal that comprises a platen and a stem attached to the platen. An adapter tube is attached to the stem. In at least one implementation, cooling collar is coupled to the adapter tube. A transition conduit is coupled to the cooling collar. In at least one implementation, an electrical enclosure is coupled to the transition conduit. In at least one implementation, electrical enclosure comprises a radio frequency (RF) connector block and a heater connector block. In at least one implementation, the RF connector block is coupled to the platen. In at least one implementation, the heater connector block is coupled to the platen.
A pedestal assembly, comprising:
A semiconductor process tool, comprising:
Dependencies are inferred from the claim text.