Substrate processing apparatus

A substrate processing apparatus, comprising:

• a chamber configured to surround an internal space by a bottom wall, a sidewall standing from a periphery of the bottom wall, and a ceiling wall covering an upper end part of the sidewall;
• a substrate processing part configured to perform predetermined substrate processing on a substrate by supplying a chemical liquid as a processing liquid onto the substrate while rotating the substrate in a horizontal posture about an axis of rotation extending in a vertical direction;
• a plurality of base support members standing vertically upward from the bottom wall;
• a base member having rigidity higher than that of the bottom wall supported by upper end parts of the plurality of base support members, the base member having a mounting surface having the substrate processing part mounted thereon, and the base member being supported by the upper end parts of the plurality of base support members spaced from the bottom wall and oriented to have the mounting surface thereof facing away from the bottom wall;
• wherein
• the base member is a metal plate,
• the substrate processing part has:
• a substrate holder attached to the base member with a lower end part thereof spaced from the bottom wall, the substrate holder being rotatable about an axis of rotation extending in a vertical direction while holding the substrate in a substantially horizontal orientation at an upper end part thereof;
• a rotating mechanism having a motor and a power transmitter configured to transmit a rotational driving force generated by the motor to the lower end part of the substrate holder so as to rotate the substrate holder about the axis of rotation by the rotational driving force, the motor attached to the base member in a position spaced upward from the bottom wall;
• and
• a nozzle configured to supply the processing liquid onto the substrate rotated about the axis of rotation while being held by an upper end part of the substrate holder;
• and
• wherein
• the base member has a first holding portion and a second holding portion, the first holding portion holding the motor while being hung from a lower surface of the base member with a rotation shaft of the motor facing toward the bottom wall, the second holding portion holding the substrate holder while being hung from the lower surface of the base member with a lower end part of the substrate holder facing toward the bottom wall, and
• the power transmitter has a first pulley attached to a lower end part of the rotation shaft, a second pulley attached to the lower end part of the substrate holder, and an endless belt put over between the first pulley and the second pulley below the base member.