Wafer transfer apparatus and semiconductor inspection device

A semiconductor inspection device, comprising:

• a wafer transfer apparatus;
• a first chamber;
• and
• a second chamber,
• wherein the wafer transfer apparatus comprises:
• a valve plate piping comprising a valve plate and a pipe extending from the valve plate in a first direction;
• a stage connected to the valve plate;
• and
• a drive mechanism connected to the pipe, the stage being located on a side of the valve plate away from the drive mechanism in the first direction, and the drive mechanism being configured to drive the valve plate piping to move in the first direction to adjust a position of the valve plate and a position of the stage in the first direction
• the first chamber is connected to the second chamber in the first direction, and the drive mechanism is located outside the second chamber and is located at a side of the second chamber away from the first chamber in the first direction;
• the valve plate is located in the second chamber, the pipe is in communication with the first chamber, and the valve plate is configured to move under an action of the drive mechanism so that the first chamber and the second chamber are in communication with or isolate from each other;
• and
• under a condition that the first chamber and the second chamber are in an isolated state, the stage is located in the first chamber, and under a condition that the first chamber and the second chamber are in a communicated state, the stage is located in the second chamber.