H10P 72/3211
Changing orientation of the substrate
Official title: {Changing orientation of the substrate, e.g. from a horizontal position to a vertical position}
H10P72/3211 (Changing orientation of the substrate) appears on 138 US grants and 223 published applications in this corpus.
Search patents in H10P- Granted patents
- 138
- Published applications
- 223
- Assignees
- 89
- Inventors
- 457
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 2 | 7 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 1 | 2 |
| 2008 | 0 | 3 |
| 2009 | 1 | 7 |
| 2010 | 1 | 4 |
| 2011 | 3 | 2 |
| 2012 | 0 | 5 |
| 2013 | 1 | 5 |
| 2014 | 1 | 4 |
| 2015 | 6 | 7 |
| 2016 | 3 | 5 |
| 2017 | 3 | 7 |
| 2018 | 6 | 12 |
| 2019 | 10 | 16 |
| 2020 | 9 | 13 |
| 2021 | 8 | 13 |
| 2022 | 11 | 33 |
| 2023 | 14 | 12 |
| 2024 | 17 | 28 |
| 2025 | 18 | 22 |
| 2026 | 17 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Flipping apparatus15 Sep 2026US 12,740,369 B2ACM Research (Shanghai) Inc.
- Substrate handling device with vertical and horizontal rails for cleaning modules8 Sep 2026US 12,728,540 B2APPLIED Materials.Inc.
- Inspection system28 Jul 2026US 12,696,717 B2APPLIED Materials.Inc.
- Substrate holder, substrate processing system, and substrate transfer method21 Jul 2026US 12,690,414 B2Tokyo Electron Limited
- Substrate processing apparatus and substrate processing method1 Oct 2026US 2026/0305239 A1SCREEN Holdings Co., Ltd.
- Chip holding tool, chip holding device, and device for manufacturing semiconductor device10 Sep 2026US 2026/0271674 A1Tokyo University of Science Foundation
- Integrated substrate processing apparatus and method20 Aug 2026US 2026/0242952 A1Picosun Oy
- Process connection device in substrate manufacturing process and operating method thereof16 Jul 2026US 2026/0206536 A1Sea, Ltd.
- Method of controlling substrate transfer apparatus2 Jul 2026US 2026/0190935 A1Absolics Inc.
Most cited
By later US patents
- Substrate treating apparatus and method for treating substrate30US 6,021,790 ADainippon Screen Mfg.Co., Ltd. · 2000
- Wafer transport system26US 4,518,078 AVarian Associates, Inc. · 1985
- Batch forming apparatus, substrate processing system, batch forming method, and storage medium17US 8,002,511 B2Tokyo Electron Limited · 2011
- Method of processing wafers and other planar articles within a processing cell14US 6,524,463 B2Technic, Inc. · 2003
- Plate member reversing system and reversing/transfer method thereof14US 9,904,259 B2Kawasaki Jukogyo Kabushiki Kaisha · 2018