Substrate holder, substrate processing system, and substrate transfer method

A substrate processing system, comprising:

• a vertical holder configured to hold a substrate in a vertical posture;
• a horizontal holder configured to hold the substrate in a horizontal posture;
• a transfer device configured to transfer the substrate held by the vertical holder to the horizontal holder, and
• a control device configured to control the transfer device,
• wherein the transfer device comprises a substrate holder configured to hold the substrate, and
• the substrate holder comprises:
• a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other;
• a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate;
• a second holding guide fixed to the leading end of the second arm, and configured to hold the periphery of the substrate;
• and
• a clamp member provided at each of the base ends, and configured to be moved between a closing position where the clamp member clamps the periphery of the substrate and an opening position where the clamp member releases clamping of the substrate,
• wherein a length between the first holding guide and the second holding guide is shorter than a diameter of the substrate, and
• in a state that the substrate is located closer to the base ends than a position where the substrate is held by the first holding guide and the second holding guide, the entire first arm, the entire second arm, the entire first holding guide and the entire second holding guide are all located diametrically outside the substrate on a same plane as the first arm and the second arm,
• wherein the control device performs:
• receiving the substrate held by the vertical holder with the substrate holder;
• changing the substrate from the vertical posture into the horizontal posture with the substrate holder;
• and
• delivering the substrate in the horizontal posture to a delivery table with the substrate holder,
• wherein the control device moves the clamp member to the closing position before changing the substrate from the vertical posture into the horizontal posture.