Substrate treating apparatus and method for treating substrate

A substrate treating apparatus for treating substrates successively, comprising:

• a body including carrying means for carrying said substrate along a carrying surface which is inclined in a plane perpendicular to the carrying direction of said substrate, said body supplying a treating liquid to said substrate being carried for treating said substrate;
• a receiving station disposed upstream of said body for changing a posture of said substrate forwarded in a horizontal posture to an inclined posture corresponding to the inclination of said carrying surface and forwarding said substrate onto said carrying means;
• and
• a delivering station disposed downstream of said body for returning said substrate forwarded from said carrying means in the inclined posture to the horizontal posture, said delivering station having:
• a plurality of carrying members arranged side by side in the carrying direction for moving said substrate in the carrying direction;
• a support member for supporting said carrying members;
• drive means for driving said carrying means;
• and
• posture changing means for changing said support member from the inclined posture, which corresponds to the posture of said substrate downstream of said substrate treating apparatus, to the horizontal posture.

A substrate treating apparatus for treating substrates successively, comprising:

• a body including a carrying unit for carrying said substrate along a carrying surface which is inclined in a plane perpendicular to the carrying direction of said substrate, said body supplying a treating liquid to said substrate being carried for treating said substrate;
• a receiving station disposed upstream of said body for changing posture of said substrate forwarded in a horizontal posture to an inclined posture corresponding to the inclination of said carrying surface and forwarding said substrate onto said carrying unit, said receiving station having:
• a plurality of carrying members arranged side-by-side in the carrying direction for moving said substrate in the carrying direction;
• a support member for supporting said carrying members;
• a drive motor for driving said carrying members;
• a posture changing device for changing said support member from the horizontal posture, which corresponds to the posture of said substrate upstream of said substrate treating apparatus, to the inclined posture;
• and
• a delivering station disposed downstream of said body for returning said substrate forwarded from said carrying unit in the inclined posture to the horizontal posture.

A substrate treating apparatus for treating substrates successively, comprising:

• a body including a carrying unit for carrying said substrate along a carrying surface which is inclined in a plane perpendicular to the carrying direction of said substrate, said body supplying a treating liquid to said substrate being carried for treating said substrate;
• a receiving station disposed upstream of said body for changing posture of said substrate forwarded in a horizontal posture to an inclined posture corresponding to the inclination of said carrying surface and forwarding said substrate onto said carrying unit;
• and
• a delivering station disposed downstream of said body for returning said substrate forwarded from said carrying unit in the inclined posture to the horizontal posture, said delivering station having:
• a plurality of carrying members arranged side-by-side in the carrying direction for moving said substrate in the carrying direction;
• a support member for supporting said carrying members;
• a drive motor to drive said carrying unit, and a posture changing device for changing said support member from the inclined posture, which corresponds to the posture of said substrate downstream of said substrate treating apparatus, to the horizontal posture.