H10P 72/32
Between different workstations
Official title: {between different workstations}
H10P72/32 (Between different workstations) appears on 2,357 US grants and 3,023 published applications in this corpus.
Search patents in H10P- Granted patents
- 2,357
- Published applications
- 3,023
- Assignees
- 704
- Inventors
- 4,973
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 0 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 3 | 0 |
| 1985 | 8 | 0 |
| 1986 | 8 | 0 |
| 1987 | 9 | 0 |
| 1988 | 5 | 0 |
| 1989 | 5 | 0 |
| 1990 | 3 | 0 |
| 1991 | 3 | 0 |
| 1992 | 8 | 0 |
| 1993 | 12 | 0 |
| 1994 | 15 | 0 |
| 1995 | 13 | 0 |
| 1996 | 5 | 0 |
| 1997 | 15 | 0 |
| 1998 | 17 | 0 |
| 1999 | 26 | 0 |
| 2000 | 35 | 0 |
| 2001 | 40 | 35 |
| 2002 | 48 | 36 |
| 2003 | 35 | 50 |
| 2004 | 25 | 31 |
| 2005 | 19 | 31 |
| 2006 | 21 | 37 |
| 2007 | 20 | 54 |
| 2008 | 18 | 53 |
| 2009 | 26 | 55 |
| 2010 | 33 | 70 |
| 2011 | 31 | 63 |
| 2012 | 45 | 89 |
| 2013 | 42 | 106 |
| 2014 | 69 | 113 |
| 2015 | 92 | 141 |
| 2016 | 99 | 108 |
| 2017 | 103 | 120 |
| 2018 | 119 | 125 |
| 2019 | 127 | 172 |
| 2020 | 126 | 203 |
| 2021 | 156 | 191 |
| 2022 | 142 | 251 |
| 2023 | 149 | 235 |
| 2024 | 203 | 268 |
| 2025 | 209 | 238 |
| 2026 | 163 | 148 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H10P 72/3202Mechanical details692
- H10P 72/3221Overhead conveying632
- H10P 72/3222Loading to or unloading from a conveyor580
- H10P 72/3218Conveying cassettes, containers or carriers574
- H10P 72/3216Using a general scheme of a conveying path within a factory331
- H10P 72/3214By means of a cart or a vehicle313
- H10P 72/3212The substrates to be conveyed not being semiconductor wafers or large planar230
- H10P 72/3204Using magnetic elements226
Recent patents
- Substrate processing system6 Oct 2026US 12,752,315 B2SCREEN Holdings Co., Ltd.
- Semiconductor arrangement and method for making6 Oct 2026US 12,752,317 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Apparatus for treating substrate and method for treating a substrate6 Oct 2026US 12,754,475 B2Semes Co., Ltd.
- Apparatus and methods for chemical mechanical polishing29 Sep 2026US 12,746,636 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Transferring unit, article transferring system, and control method of transferring unit29 Sep 2026US 12,747,107 B2Semes Co., Ltd.
- Carrying method and device for cleaning foup8 Oct 2026US 2026/0307916 A1Asia Neo Tech Industrial Co., Ltd.
- Semiconductor Thermal Processing Apparatus and Method for Transferring Workpieces by Carrier Device Thereof8 Oct 2026US 2026/0314307 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Wafer container, top cover thereof, and method for managing wafer containers8 Oct 2026US 2026/0314313 A1Nanya Technology Corporation
- Wafer Transportation8 Oct 2026US 2026/0314315 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Substrate processing apparatus and substrate processing method8 Oct 2026US 2026/0314316 A1SCREEN Holdings Co., Ltd.
Most cited
By later US patents
- Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers604US 5,388,945 AInternational Business Machines Corporation · 1995
- Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum489US 9,543,180 B2ASM IP Holding B. V. · 2017
- Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations456US 9,355,876 B2APPLIED Materials.Inc. · 2016
- Substrate processing apparatus and manufacturing method for a semiconductor device448US 9,111,972 B2Hitachi Kokusai Electric Inc. · 2015
- Vacuum processing apparatus and semiconductor manufacturing line using the same377US 5,855,726 AHitachi, Ltd. · 1999