Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations

An electronic device processing system, comprising:

• a mainframe section including a robot configured to move substrates;
• a factory interface having one or more load ports adapted to receive substrate carriers thereat;
• and
• a process load lock apparatus received between the mainframe section and the factory interface, the process load lock apparatus including
• a load lock chamber located between and coupled to the mainframe section and the factory interface, the load lock chamber including an entrance accessible from the factory interface and an exit accessible from the mainframe section, and
• a load lock process chamber adapted to carry out a process on a substrate, the load lock process chamber coupled to the mainframe section and located at a different level than the load lock chamber
• the load lock process chamber further includes a lift assembly including a containment ring, and horizontally extending fingers configured to support a substrate underneath the containment ring,
• wherein the containment ring and the horizontally extending fingers are configured to move as a unit upon actuation by a lift actuator.