Carrying method and device for cleaning foup

A FOUP carrying method for transporting the FOUP for cleaning, wherein the FOUP before cleaning comprises a shell and a door locked onto the shell, and the weight of the FOUP and the shell is relatively heavier than the door;

• the carrying method comprises constructing a one-time transportation path for a gripper to grip and disassemble the FOUP between a load port, an unlocking station, and a cleaning station, wherein the gripper has a first clamper and a second clamper respectively provided on its two end faces, and the one-time transportation path of the gripper sequentially includes:
• (1) grasping the shell via the first clamper from the load port to transport the FOUP awaiting cleaning to the unlocking station for unlocking the door on the shell, and lifting the shell while leaving the unlocked door at the unlocking station;
• (2) grasping the unlocked door via the second clamper from the unlocking station, thereby simultaneously transporting the shell and the door to the cleaning station for respective placement;
• (3) grasping the shell via the first clamper from the cleaning station and grasping the door via the second clamper from the cleaning station, thereby simultaneously transporting the shell and the door to the unlocking station for locking and presenting the cleaned FOUP;
• and
• (4) grasping the shell via the first clamper from the unlocking station to transport the cleaned FOUP to the load port for placement;
• wherein, one side of the shell forms a flange, and when the gripper transports the FOUP and the shell, the flange provides clamping points for the first clamper, and when the gripper transports the door, the second clamper clamps the door;
• the gripper undergoes reciprocating swing at a specific angle to enable the first clamper to clamp the flange and the second clamper to clamp the door.