H10P 72/3206
The substrate being handled substantially vertically
Official title: {the substrate being handled substantially vertically}
H10P72/3206 (The substrate being handled substantially vertically) appears on 186 US grants and 260 published applications in this corpus.
Search patents in H10P- Granted patents
- 186
- Published applications
- 260
- Assignees
- 117
- Inventors
- 590
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 4 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 4 | 0 |
| 2002 | 0 | 2 |
| 2003 | 5 | 6 |
| 2004 | 0 | 1 |
| 2005 | 0 | 1 |
| 2006 | 0 | 2 |
| 2007 | 1 | 1 |
| 2008 | 0 | 5 |
| 2009 | 1 | 8 |
| 2010 | 2 | 8 |
| 2011 | 2 | 8 |
| 2012 | 4 | 11 |
| 2013 | 3 | 4 |
| 2014 | 7 | 11 |
| 2015 | 6 | 10 |
| 2016 | 8 | 7 |
| 2017 | 5 | 16 |
| 2018 | 8 | 6 |
| 2019 | 8 | 17 |
| 2020 | 8 | 16 |
| 2021 | 10 | 19 |
| 2022 | 12 | 20 |
| 2023 | 14 | 20 |
| 2024 | 18 | 30 |
| 2025 | 19 | 20 |
| 2026 | 14 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Carriage lifting/lowering device15 Sep 2026US 12,735,297 B2Murata Machinery, Ltd.
- Article elevating device8 Sep 2026US 12,733,438 B2Daifuku Co., Ltd.
- Substrate processing module and substrate processing device provided with same14 Jul 2026US 12,678,833 B2Daikin Finetech, Ltd.
- Semiconductor process equipment23 Jun 2026US 12,666,910 B2APPLIED Materials.Inc.
- Semiconductor carrier storage system, semiconductor fabrication system including the same, and semiconductor fabrication method using the same23 Jun 2026US 12,666,914 B2Samsung Electronics Co., Ltd.
- Overhead transport vehicle1 Oct 2026US 2026/0296839 A1Murata Machinery, Ltd.
- Substrate processing apparatus24 Sep 2026US 2026/0293593 A1Ebara Corporation
- Substrate processing module and substrate processing device10 Sep 2026US 2026/0271665 A1Daikin Finetech, Ltd.
- Printed circuit board edge hold down belt for cleaner6 Aug 2026US 2026/0225134 A1Illinois Tool Works Inc.
- Substrate processing system and movable maintenance apparatus16 Jul 2026US 2026/0198679 A1Tokyo Electron Limited
Most cited
By later US patents
- Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations456US 9,355,876 B2APPLIED Materials.Inc. · 2016
- Apparatus and method for high throughput sputtering366US 5,683,561 AConner Peripherals, Inc. · 1997
- Integrated building and conveying structure for manufacturing under ultraclean conditions119US 5,344,365 ASematech, Inc. · 1994
- Installation for the storage and transfer of objects in a very clean atmosphere89US 4,851,018 ACommissariat A L' Energie Atomique · 1989
- Corner chamber with heater69US 8,517,657 B2WD Media, LLC · 2013