Substrate processing module and substrate processing device

Abstract

A substrate processing module and a substrate processing module include: a first tank and a second tank that are arranged in a first direction and in which a substrate can be disposed; a first conveyance mechanism that moves the substrate in the first direction; and a second conveyance mechanism that moves the substrate in a second direction intersecting the first direction, wherein the first tank and the second tank are disposed in a first region, the first conveyance mechanism conveys the substrate in the first direction in a second region disposed above the first region, and the second conveyance mechanism conveys the substrate in the second direction in a third region different from the second region.

Dependencies are inferred from the claim text.