Substrate processing system and movable maintenance apparatus

A substrate processing system comprising:

• a substrate processing apparatus;
• a maintenance apparatus;
• and
• control circuitry, wherein
• the substrate processing apparatus includes
• a substrate processing module including a substrate processing chamber, and
• a vacuum transfer module,
• the vacuum transfer module includes
• a vacuum transfer chamber having a first opening and a second opening, the vacuum transfer chamber being connected to the substrate processing module through the first opening, and
• a first planar motor configured to move at least one magnetically floating movable body along a first plane in the vacuum transfer chamber,
• the maintenance apparatus includes
• a standby chamber connected to the vacuum transfer chamber through the second opening, and
• a second planar motor configured to move the at least one magnetically floating movable body along a second plane extending from the first plane into the standby chamber,
• the at least one magnetically floating movable body includes at least one magnetically floating maintenance unit standing by in the standby chamber in a substrate processing mode, the at least one magnetically floating maintenance unit including at least one of a pick and a base, and
• the control circuitry is configured to control the first planar motor and the second planar motor in a maintenance mode to move the at least one magnetically floating maintenance unit from the standby chamber to the vacuum transfer chamber.