Substrate processing module and substrate processing device provided with same

A substrate processing module that processes a substrate, the substrate processing module comprising:

• a first tank and a second tank that are arranged in a first direction that is a front-back direction of the substrate processing module, and in which a substrate can be disposed;
• a first transport unit that transports the substrate to the first tank and the second tank;
• and
• a second transport unit that transports the substrate in a second direction intersecting the first direction and transfers the substrate to and from the first transport unit,
• wherein the first tank is located on a front side of the substrate processing module,
• the second tank is located on a back side of the substrate processing module,
• the second transport unit includes a chuck that holds the substrate and passes above the first tank, and an actuator that moves the chuck in the second direction,
• the actuator includes a moving head moving in the second direction and supporting the chuck,
• the actuator of the second transport unit is disposed on a side of the first tank in the first direction in the substrate processing module, and
• the moving head moves in the second direction with at least a portion of the moving head overlapped with the first tank as viewed in a third direction intersecting both the first and second directions.