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US 4,518,078 AGranted
Wafer transport system
AssigneeVarian Associates, Inc.
InventorCharles B. Garrett
Life of this patent
Estimating the term…
Abstract
A wafer transport system for use in in-line sputtering systems having a first magnet exterior to a process chamber and a second magnet in the process chamber connected to wafer support arms carrying wafers such that the magnetic coupling between the magnets permits the positioning of the wafer support arms in a desired location by movement of the exterior magnet.
Claims9
A wafer transport system comprising in combination:
- transport means for carrying a member in translational motion;
- a first magnet coupled to said transport means;
- a second magnet mounted on a first plate, said first plate being connected to a fixed first guide rail by a bearing means permitting translational motion in a single plane;
- a first transport rail adjacent and parallel to the first guide rail and rigidly connected to said first plate;
- a second transport rail adjacent and parallel to the first transport rail and rigidly connected to the first transport rail fixing the first and second transport rails in the same plane as said first plate;
- a second plate rigidly connected to the second transport rail;
- a second fixed guide rail connected to said second plate by a bearing means to permit motion in a single plane;
- a first, second, and third pair of wafer support arms with the first arm of a given pair pivotally mounted to the first transport rail and the second arm pivotally mounted to the second transport rail at a position directly opposite the first arm;
- and
- a lifting means for taking a wafer off the wafer support arms and returning a wafer to the wafer support arms;
- whereby movement of the first magnet causes movement of the second magnet thereby causing the first and second transport rails to move in the same direction and distance as the first magnet thereby positioning the wafer support arms in a desired position with respect to the lifting means.
8 more elements
A wafer transport system comprising in combination:
- transport drive means;
- a first plate connected to a fixed first guide rail by a bearing means permitting translational motion in a single plane;
- means for coupling said transport means to said first plate;
- a first transport rail adjacent and parallel to said first guide rail and rigidly connected to said first plate;
- a second transport rail adjacent and parallel to said first transport rail and rigidly connected to said first transport rail fixing said first and second transport rails in the same plane as said first plate;
- a second plate rigidly connected to said second transport rail;
- a second fixed guide rail connected to said second plate by a bearing means to permit motion in a single plane;
- a first, second and third pair of wafer support arms with the first arm of a given pair pivotally mounted to said first transport rail and the second arm pivotally mounted to said second transport rail at a position directly opposite the first arm;
- and
- a lifting means for taking a wafer off said wafer support arms and returning a wafer to said wafer support arms;
- whereby said transport drive means causes movement of said first plate thereby causing said first and second transport rails to move in the same direction and distance as said first plate thereby positioning said wafer support arms in a desired position with respect to said lifting means.
8 more elements
Dependencies are inferred from the claim text.