Process connection device in substrate manufacturing process and operating method thereof

Abstract

A process connection device in a substrate manufacturing process and an operating method thereof are disclosed. A process connection device in a substrate manufacturing process according to an embodiment may comprise an automation unit configured to sequentially stack horizontally positioned substrates loaded in a horizontal direction onto a horizontally positioned carrier, convert the horizontally positioned carrier into a vertical position, insert the vertically positioned carrier into a vertical process, convert the vertically positioned carrier discharged from the vertical process into a horizontal position, and sequentially discharge the horizontally positioned substrates from the horizontally positioned carrier and insert them into a horizontal process.

Dependencies are inferred from the claim text.