Method of controlling substrate transfer apparatus

A method of controlling a substrate transfer apparatus, performed by the substrate transfer apparatus equipped with a flipper, the method comprising:

• generating sequences that include values indicating a substrate sequence number, a process to be performed on each side of a glass substrate, and whether inspection is to be performed, according to a set number of substrates to be processed and the process to be performed on each surface side of the glass substrate set by a user;
• processing the sequences;
• determining, according to a processing order sequence, whether a current surface of a loaded glass substrate corresponds to a processing surface;
• operating the flipper to invert the loaded glass substrate when it is determined not to correspond to the processing surface;
• transferring the glass substrate to equipment connected to the substrate transfer apparatus and performing a process according to the processing order sequence;
• determining whether a value indicating whether or not to perform inspection in the processing order sequence corresponds to performing inspection;
• and
• when it is determined to correspond to performing inspection, inspecting the processing surface of the glass substrate and outputting an inspection result.