Substrate handling device with vertical and horizontal rails for cleaning modules

A substrate handling device, comprising:

• a first blade assembly comprising:
• a first gripping assembly comprising a first pair of gripping blades and a first gripping actuator, wherein the first gripping actuator is configured to cause a substrate to be retained between the first pair of gripping blades during a first transferring process;
• a first blade actuator for rotating the first gripping assembly about a first axis, the first blade actuator comprising a first actuator motor that is coupled to a first drive gear and an first offset gear, wherein the first actuator motor is configured to rotate the first drive gear, which cause the first offset gear to rotate about the first axis, and causes the rotation of a second blade actuator and the first gripping assembly, wherein rotating the first gripping assembly about the first axis is configured to cause the substrate to be rotated between a horizontal and a vertical orientation during the first transferring process;
• and
• a second blade actuator configured for rotating the first gripping assembly about a second axis, the second blade actuator comprising a second actuator motor that is coupled to a second drive gear and an second offset gear, wherein the second actuator motor is configured to rotate the second drive gear, which causes the second offset gear to rotate about the second axis, and causes the rotation of the first gripping assembly, wherein the second axis is substantially parallel to a front surface of the substrate, and rotating the first gripping assembly about a second axis is configured to cause the front surface of the substrate to face an opposite direction during the first transferring process,
• wherein rotation about the first axis by the first blade actuator results in rotation of the second blade actuator and the first gripping assembly, and rotation about the second axis by the second blade actuator results in rotation of the first gripping assembly;
• a first vertical actuator assembly comprising a first vertical rail and a first vertical actuator, wherein the first blade assembly is coupled to a portion of the first vertical rail and is configured to be positioned along the first vertical rail by the first vertical actuator;
• a second blade assembly comprising:
• a second gripping assembly comprising a second pair of gripping blades and a second gripping actuator, wherein the second gripping actuator is configured to cause a substrate to be retained between the second pair of gripping blades during a second transferring process;
• and
• a second vertical actuator assembly comprising a second vertical rail and a second vertical actuator, wherein the second blade assembly is coupled to a portion of the second vertical rail and is configured to be positioned along the second vertical rail by the second vertical actuator,
• a horizontal actuator assembly comprising:
• a horizontal rail;
• a first horizontal rail actuator;
• and
• a second horizontal rail actuator,
• wherein:
• the first vertical actuator assembly is coupled to a first portion of the horizontal rail and is configured to be positioned along the horizontal rail by the first horizontal rail actuator, and
• the second vertical actuator assembly is coupled to a second portion of the horizontal rail and is configured to be positioned along the horizontal rail by the second horizontal rail actuator.