C23C 16/482
Using incoherent light, uv to ir
Official title: {using incoherent light, UV to IR, e.g. lamps}
C23C16/482 (Using incoherent light, uv to ir) appears on 369 US grants and 317 published applications in this corpus.
Search patents in C23C- Granted patents
- 369
- Published applications
- 317
- Assignees
- 180
- Inventors
- 871
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 3 | 0 |
| 1983 | 1 | 0 |
| 1984 | 5 | 0 |
| 1985 | 8 | 0 |
| 1986 | 5 | 0 |
| 1987 | 7 | 0 |
| 1988 | 10 | 0 |
| 1989 | 14 | 0 |
| 1990 | 10 | 0 |
| 1991 | 3 | 0 |
| 1992 | 13 | 0 |
| 1993 | 8 | 0 |
| 1994 | 7 | 0 |
| 1995 | 10 | 0 |
| 1996 | 9 | 0 |
| 1997 | 13 | 0 |
| 1998 | 18 | 0 |
| 1999 | 9 | 0 |
| 2000 | 12 | 0 |
| 2001 | 7 | 2 |
| 2002 | 6 | 10 |
| 2003 | 13 | 11 |
| 2004 | 2 | 9 |
| 2005 | 8 | 13 |
| 2006 | 6 | 14 |
| 2007 | 4 | 11 |
| 2008 | 6 | 9 |
| 2009 | 2 | 5 |
| 2010 | 5 | 9 |
| 2011 | 4 | 7 |
| 2012 | 4 | 6 |
| 2013 | 4 | 4 |
| 2014 | 7 | 8 |
| 2015 | 4 | 14 |
| 2016 | 7 | 13 |
| 2017 | 6 | 11 |
| 2018 | 10 | 11 |
| 2019 | 11 | 18 |
| 2020 | 9 | 11 |
| 2021 | 10 | 13 |
| 2022 | 9 | 19 |
| 2023 | 10 | 23 |
| 2024 | 18 | 29 |
| 2025 | 18 | 23 |
| 2026 | 12 | 14 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Methods of forming structures, semiconductor processing systems, and semiconductor device structures22 Sep 2026US 12,742,242 B2ASM IP Holding B. V.
- Multi-zone lamp heating for chemical vapor deposition25 Aug 2026US 12,721,089 B2APPLIED Materials.Inc.
- Jig for alignment in relation to a process chamber, and related apparatus, systems, and methods11 Aug 2026US 12,703,918 B2APPLIED Materials.Inc.
- Semiconductor processing chamber, semiconductor processing equipment and vapor epitaxy equipment4 Aug 2026US 12,698,571 B2Advanced Micro-Fabrication Equipment Inc. China
- Method and apparatus for deposition of at least one layer, optical element and optical arrangement28 Jul 2026US 12,692,603 B2Carl Zeiss SMT GmbH
- Upper liner ring for vapor deposition process chamber10 Sep 2026US 2026/0265907 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Flash-enhanced atomic layer deposition and chemical vapor deposition of metals10 Sep 2026US 2026/0265909 A1Lam Research Corporation
- Secondary translating susceptor for superconductor manufacturing10 Sep 2026US 2026/0265918 A1MetOx Technologies, Inc.
- Superconductor flux pinning without columnar defects2 Jul 2026US 2026/0190867 A1MetOx International, Inc.
- Process modules including independently operable lift mechanisms and semiconductor processing systems including such process modules28 May 2026US 2026/0146330 A1ASM IP Holding B. V.
Most cited
By later US patents
- Photo-assisted CVD apparatus791US 5,527,417 AKabushiki Kaisha Toshiba · 1996
- Methods for forming metal oxide layers with enhanced purity606US 6,395,650 B1International Business Machines Corporation · 2002
- Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction583US 5,288,684 ASemiconductor Energy Laboratory Co.Ltd. · 1994
- Methods and apparatus for material deposition577US 5,119,760 ASymetrix Corporation · 1992
- UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition574US 6,284,050 B1Novellus Systems, Inc. · 2001