Jig for alignment in relation to a process chamber, and related apparatus, systems, and methods

An alignment assembly, comprising:

• a sensor;
• a lid comprising a first window;
• a rotary joint coupled to the lid;
• a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint, the jig comprising:
• a base arm comprising at least one base opening;
• an extendable arm that is moveable:
• from a retracted position where the sensor is disposed in a first position above the first window, and
• to an extended position where the sensor is disposed at a second position above the first window, the extendable arm comprising a first opening and a second opening offset from each other by a distance, the first opening is aligned with at least part of the at least one base opening when the extendable arm is in the retracted position, and the second opening is aligned with at least part of the at least one base opening when the extendable arm is in the extended position;
• a sensor mount coupled to a first end of the extendable arm;
• and
• a guide rail assembly, comprising:
• at least one rail;
• a carriage engaged with the at least one rail and coupled to the extendable arm, the carriage is moveable along the at least one rail to move the extendable arm between the retracted position and the extended position;
• and
• a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.