Multi-zone lamp heating for chemical vapor deposition

A semiconductor processing tool, comprising:

• a pedestal with a first surface and a second surface for supporting a substrate;
• a first enclosure facing the first surface of the pedestal;
• a second enclosure facing the second surface of the pedestal;
• a first lamp module outside the first enclosure and the second enclosure, wherein the first lamp module comprises three or more heating zones;
• and
• a second lamp module outside the first enclosure and the second enclosure on an opposite side from the first lamp module, wherein the second lamp module comprises a plurality of heating zones, wherein the second lamp module or the first lamp module comprises:
• a back plate;
• a first ring that extends from the back plate;
• a second ring that extends from the back plate;
• a third ring that extends from the back plate;
• a first plurality of lamps between the first ring and the second ring, each lamp of the first plurality of lamps having a length greater than a width in a plan view, and each lamp of the first plurality of lamps having a centerline along the length that is non-orthogonal to the first ring and the second ring;
• a second plurality of lamps between the second ring and the third ring, each lamp of the second plurality of lamps having a length greater than a width in the plan view, and each lamp of the second plurality of lamps having a centerline along the length that is orthogonal to the second ring and the third ring;
• a third plurality of lamps configured to emit infrared radiation that propagates into the third ring;
• and
• a window through the back plate, the window intersecting with and extending through each of the second ring and the third ring.

A lamp module for a semiconductor processing chamber, comprising:

• a back plate;
• a plurality of lamp zones separated from each other by rings that extend from the back plate;
• a plurality of lamps positioned within each of the plurality of lamp zones, wherein a first plurality of lamps are oriented to irradiate an outer zone of a substrate positioned below the lamp module, wherein a second plurality of lamps are oriented to irradiate a middle zone of the substrate positioned below the lamp module, wherein a third plurality of lamps are oriented to irradiate a center zone of the substrate positioned below the lamp module, each lamp of the first plurality of lamps having a length greater than a width in a plan view, and each lamp of the first plurality of lamps having a centerline along the length that is non-orthogonal to the first ring and the second ring, each lamp of the second plurality of lamps having a length greater than a width in the plan view, and each lamp of the second plurality of lamps having a centerline along the length that is orthogonal to the second ring and the third ring;
• and
• a window through the back plate, the window intersecting with and extending through each of two or more of the rings.