C23C 16/04
Coating on selected surface areas
Official title: Coating on selected surface areas, e.g. using masks
C23C16/04 (Coating on selected surface areas) appears on 3,429 US grants and 4,483 published applications in this corpus.
Search patents in C23C- Granted patents
- 3,429
- Published applications
- 4,483
- Assignees
- 1,047
- Inventors
- 8,006
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 2 | 0 |
| 1978 | 3 | 0 |
| 1979 | 3 | 0 |
| 1980 | 3 | 0 |
| 1981 | 3 | 0 |
| 1982 | 4 | 0 |
| 1983 | 4 | 0 |
| 1984 | 5 | 0 |
| 1985 | 6 | 0 |
| 1986 | 11 | 0 |
| 1987 | 13 | 0 |
| 1988 | 15 | 0 |
| 1989 | 13 | 0 |
| 1990 | 22 | 0 |
| 1991 | 13 | 0 |
| 1992 | 24 | 0 |
| 1993 | 33 | 0 |
| 1994 | 43 | 0 |
| 1995 | 46 | 0 |
| 1996 | 28 | 0 |
| 1997 | 32 | 0 |
| 1998 | 41 | 0 |
| 1999 | 48 | 0 |
| 2000 | 58 | 0 |
| 2001 | 47 | 20 |
| 2002 | 61 | 65 |
| 2003 | 48 | 76 |
| 2004 | 56 | 84 |
| 2005 | 57 | 100 |
| 2006 | 43 | 108 |
| 2007 | 50 | 76 |
| 2008 | 40 | 87 |
| 2009 | 49 | 95 |
| 2010 | 67 | 90 |
| 2011 | 80 | 83 |
| 2012 | 59 | 110 |
| 2013 | 82 | 119 |
| 2014 | 79 | 125 |
| 2015 | 97 | 157 |
| 2016 | 111 | 185 |
| 2017 | 135 | 203 |
| 2018 | 146 | 231 |
| 2019 | 198 | 257 |
| 2020 | 203 | 285 |
| 2021 | 174 | 273 |
| 2022 | 196 | 348 |
| 2023 | 206 | 335 |
| 2024 | 239 | 324 |
| 2025 | 261 | 414 |
| 2026 | 167 | 233 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Filling method and film forming apparatus6 Oct 2026US 12,753,491 B2Tokyo Electron Limited
- Chemical vapor deposition during additive manufacturing6 Oct 2026US 12,753,509 B2General Electric Company
- Mask assembly, method of manufacturing mask assembly, and method and apparatus for manufacturing display device29 Sep 2026US 12,747,494 B2Samsung Display Co., Ltd.
- Method for functionalizing a polymer-based substrate by chemical deposition of a thin layer29 Sep 2026US 12,747,495 B2Centre National De La Recherche Scientifique
- Optical devices including metastructures and methods for fabricating the optical devices29 Sep 2026US 12,748,240 B2NIL Technology ApS
- Process for manufacturing a silicon carbide coated body8 Oct 2026US 2026/0308754 A1APPLIED Materials.Inc.
- Area selective deposition of metal film on silicon containing surfaces utilizing alcohols8 Oct 2026US 2026/0308761 A1Merck Patent GmbH
- Film formation method and film formation apparatus1 Oct 2026US 2026/0297728 A1Tokyo Electron Limited
- Method of forming a structure using selective deposition on a metal surface1 Oct 2026US 2026/0297729 A1ASM IP Holding B. V.
- Topology-selective deposition method and structure formed using same1 Oct 2026US 2026/0297730 A1ASM IP Holding B. V.
Most cited
By later US patents
- Production of elemental thin films using a boron-containing reducing agent809US 6,475,276 B1ASM Microchemistry Oy · 2002
- Method and system for improving dielectric film quality for void free gap fill649US 7,541,297 B2APPLIED Materials.Inc. · 2009
- Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same643US 4,978,567 AMaterials Technology Corporation, subsidiary of the Carbon/Graphite Group, Inc. · 1990
- Method of growing nitride semiconductors, nitride semiconductor substrate and nitride semiconductor device643US 6,153,010 ANichia Chemical Industries, Ltd. · 2000
- Method of forming conformal dielectric film having Si-N bonds by PECVD603US 7,919,416 B2ASM Japan K .K. · 2011