Mask assembly, method of manufacturing mask assembly, and method and apparatus for manufacturing display device

A method of manufacturing a display device, the method comprising:

• arranging a substrate and a mask assembly to face a deposition source;
• and
• supplying a deposition material from the deposition source to cause the deposition material to pass through the mask assembly and be deposited on the substrate,
• wherein the mask assembly comprises:
• a support defining a first opening therein;
• a connection portion defining a second opening therein, arranged on the support, and comprising at least one of metal, metal oxide, metal nitride, and alloy thereof, wherein the second opening corresponds to the first opening;
• and
• a mask arranged on the connection portion, configured to shield the first opening and the second opening, and defining a plurality of pattern holes corresponding to the first opening and the second opening,
• wherein a width of the pattern holes in a plan view decreases in a direction away from the support, from one surface of the mask facing the connection portion to one point of the pattern holes and increases in the direction away from the support, from the one point of the pattern holes to another surface of the mask opposite to the one surface.