B81C 1/00531
Dry etching
Official title: {Dry etching}
B81C1/00531 (Dry etching) appears on 195 US grants and 229 published applications in this corpus.
Search patents in B81C- Granted patents
- 195
- Published applications
- 229
- Assignees
- 146
- Inventors
- 521
- Latest grant
- 27 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 2 | 0 |
| 2001 | 1 | 1 |
| 2002 | 1 | 3 |
| 2003 | 0 | 3 |
| 2004 | 2 | 2 |
| 2005 | 3 | 4 |
| 2006 | 2 | 6 |
| 2007 | 2 | 4 |
| 2008 | 3 | 2 |
| 2009 | 2 | 4 |
| 2010 | 2 | 5 |
| 2011 | 2 | 5 |
| 2012 | 3 | 2 |
| 2013 | 5 | 5 |
| 2014 | 7 | 26 |
| 2015 | 19 | 25 |
| 2016 | 18 | 28 |
| 2017 | 12 | 9 |
| 2018 | 19 | 15 |
| 2019 | 16 | 16 |
| 2020 | 18 | 21 |
| 2021 | 18 | 16 |
| 2022 | 13 | 6 |
| 2023 | 11 | 1 |
| 2024 | 4 | 8 |
| 2025 | 4 | 7 |
| 2026 | 2 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for wafer treatment27 Jan 2026US 12,538,764 B2Hua Hsu Advanced Technology Co., Ltd.
- Methods of fabricating porous silicon structures6 Jan 2026US 12,516,438 B2The Methodist Hospital
- Etching method11 Nov 2025US 12,469,711 B2Ulvac, Inc.
- Manufacturing a semiconductor structure15 Apr 2025US 12,276,839 B2Smart Photonics Holding B.V.
- Method of fabricating structured membranes25 Mar 2025US 12,259,656 B1United States of America as represented by the Administrator of NASA
- Mems with curved mirrors and methods of manufacture17 Sep 2026US 2026/0276946 A1Calient.Ai Inc.
- Method for producing a silicon layer system with electrical connections27 Aug 2026US 2026/0250122 A1
- Method and apparatus for providing membrane pattern built-in differential piezoresistive pressure sensors30 Jul 2026US 2026/0219120 A1Posifa Technologies Inc.
- Method for singulating a wafer and suitable device21 May 2026US 2026/0138869 A1Carl Zeiss SMT GmbH
- Methods of fabricating porous silicon structures15 Jan 2026US 2026/0015759 A1The Methodist Hospital
Most cited
By later US patents
- Method and apparatus for etching100US 8,298,959 B2APPLIED Materials.Inc. · 2012
- Process for fabricating submicron single crystal electromechanical structures74US 5,393,375 ACornell Research Foundation, Inc. · 1995
- Method for anisotropic plasma etching of substrates60US 5,498,312 ARobert Bosch GmbH · 1996
- Method for vapor phase etching of silicon50US 7,041,224 B2Reflectivity, INC · 2006
- Fracture-resistant micromachined devices46US 6,171,972 B2Rosemount Aerospace Inc. · 2001