Mems with curved mirrors and methods of manufacture
AssigneeCalient.Ai Inc.
InventorAndrew HOCKING
Life of this patent
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Abstract
This disclosure describes a small MEMS mirror whose surface shape can be adjusted as needed. The mirror sits on a thin flexible membrane, which is held by flexures in a frame and supported from below by a post so that it can bend in a controlled way. Electrodes placed under and around the membrane apply voltages that pull on the membrane and change the mirror from its built-in curved shape toward flatter or oppositely curved shapes. Separate electrical paths run through different flexures so the voltages to the movable mirror side and the fixed electrode side stay isolated, allowing independent, stable, and precise control of the mirror curvature.
Claims33
An adjustable-curvature micro-electro-mechanical systems (MEMS) mirror device comprising:
- a frame;
- a mirror stage coupled to the frame via a plurality of flexures including a first flexure and a second flexure, the mirror stage comprising a membrane layer and a mirror layer disposed on the membrane layer;
- a mirror post mount and a mirror post extending from the mirror post mount, the mirror post mount and the mirror post supporting the mirror stage;
- a bottom electrode having an upper portion disposed adjacent to an underside of the membrane layer;
- wherein the first flexure is electrically coupled to the membrane layer;
- wherein the second flexure is electrically coupled to the bottom electrode;
- and
- wherein a first voltage supplied to the first flexure and a second voltage supplied to the second flexure are routed through mutually isolated conductive paths such that the first voltage is insulated from the second voltage.
An adjustable-curvature micro-electro-mechanical systems (MEMS) mirror device comprising:
- a frame;
- a mirror stage coupled to the frame via a plurality of flexures including a first flexure and a second flexure, the mirror stage comprising a membrane layer and a mirror layer disposed on the membrane layer;
- a plurality of first fingers extending outwardly from the membrane layer;
- a mirror post mount and a mirror post extending from the mirror post mount, the mirror post mount and the mirror post supporting the mirror stage;
- a comb mount surrounding the mirror post mount;
- a plurality of second fingers extending inwardly from an upper portion of the comb mount and interdigitated with the plurality of first fingers to form a comb-finger actuator;
- wherein the first flexure is electrically coupled to the membrane layer and the plurality of first fingers;
- wherein the second flexure is electrically coupled to the comb mount and the plurality of second fingers;
- and
- wherein a first voltage supplied to the first flexure and a second voltage supplied to the second flexure are routed through mutually isolated conductive paths such that the first voltage is insulated from the second voltage.
An adjustable-curvature micro-electro-mechanical systems (MEMS) mirror device comprising:
- a frame;
- a mirror stage coupled to the frame via a plurality of flexures including a first flexure and a second flexure, the mirror stage comprising a membrane layer and a mirror layer disposed on the membrane layer;
- a plurality of first fingers extending outwardly from the membrane layer;
- a mirror post mount and a mirror post extending from the mirror post mount, the mirror post mount and the mirror post supporting the mirror stage;
- a comb mount surrounding the mirror post mount;
- a plurality of second fingers extending inwardly from an upper portion of the comb mount and interdigitated with the plurality of first fingers to form a comb-finger actuator;
- and
- a parallel plate assistance electrode surrounding the mirror post mount and disposed beneath at least a portion of the membrane layer;
- wherein the first flexure is electrically coupled to the membrane layer and the plurality of first fingers;
- wherein the second flexure is electrically coupled to the parallel plate assistance electrode, the comb mount, and the plurality of second fingers;
- and
- wherein a first voltage supplied to the first flexure and a second voltage supplied to the second flexure are routed through mutually isolated conductive paths such that the first voltage is insulated from the second voltage.
A method of fabricating a micro-electro-mechanical systems (MEMS) array, the method comprising:
- forming first etched regions on a first wafer;
- forming partially etched regions on a second wafer;
- bonding the second wafer to the first wafer;
- removing at least a portion of the second wafer;
- forming isolation trenches in the first wafer;
- filling the isolation trenches with dielectric material;
- forming vias in the first wafer;
- depositing a first metal layer on the first wafer;
- depositing a second metal layer on the first wafer to form a reflective surface;
- etching the first wafer to form blades;.
- bonding a base wafer to the first wafer;
- and
- forming release trenches in the first wafer to release MEMS structures.
Dependencies are inferred from the claim text.