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AssigneeUnited States of America as represented by the Administrator of NASA
InventorsElissa Williams, Kevin Denis, Hsiang-Yu Liu
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A structured membrane fabrication method begins with a membrane wafer on a substrate and at least one thin-film on the membrane wafer such that portions of the membrane wafer are exposed. The exposed portions of the membrane wafer and each thin-film are covered with an acetone-inert protectant. Portions of the protectant are etched through to the membrane wafer while each thin-film remains fully covered by the protectant. A handle is coupled to the protectant with a wax that dissolves in acetone. Portions of the substrate are then removed to define and expose a contiguous region of the membrane wafer adjacent to each thin-film and the portions of the protectant so-etched. The wax is exposed to acetone so that it dissolves. The contiguous region of the membrane wafer is then etched through at the portions of the protectant so-etched. The protectant is then removed.
A method comprising the steps of:
A method comprising the steps of:
A method comprising the steps of:
Dependencies are inferred from the claim text.