H10P 72/0451
Apparatus for manufacturing or treating in a plurality of work-stations
Official title: {Apparatus for manufacturing or treating in a plurality of work-stations}
H10P72/0451 (Apparatus for manufacturing or treating in a plurality of work-stations) appears on 6,045 US grants and 8,120 published applications in this corpus.
Search patents in H10P- Granted patents
- 6,045
- Published applications
- 8,120
- Assignees
- 973
- Inventors
- 12,007
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 3 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 6 | 0 |
| 1987 | 9 | 0 |
| 1988 | 7 | 0 |
| 1989 | 13 | 0 |
| 1990 | 10 | 0 |
| 1991 | 19 | 0 |
| 1992 | 11 | 0 |
| 1993 | 23 | 0 |
| 1994 | 28 | 0 |
| 1995 | 21 | 0 |
| 1996 | 27 | 0 |
| 1997 | 34 | 0 |
| 1998 | 48 | 0 |
| 1999 | 65 | 0 |
| 2000 | 89 | 0 |
| 2001 | 114 | 84 |
| 2002 | 119 | 159 |
| 2003 | 110 | 133 |
| 2004 | 102 | 177 |
| 2005 | 117 | 185 |
| 2006 | 91 | 222 |
| 2007 | 93 | 242 |
| 2008 | 84 | 290 |
| 2009 | 92 | 250 |
| 2010 | 143 | 211 |
| 2011 | 173 | 253 |
| 2012 | 173 | 277 |
| 2013 | 172 | 226 |
| 2014 | 208 | 267 |
| 2015 | 225 | 277 |
| 2016 | 226 | 251 |
| 2017 | 188 | 335 |
| 2018 | 231 | 410 |
| 2019 | 311 | 453 |
| 2020 | 364 | 545 |
| 2021 | 387 | 497 |
| 2022 | 366 | 582 |
| 2023 | 398 | 602 |
| 2024 | 436 | 473 |
| 2025 | 425 | 431 |
| 2026 | 275 | 288 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H10P 72/0452Characterised by the layout of the process chambers2,763
- H10P 72/0468Comprising a chamber adapted to a particular process2,012
- H10P 72/0462Characterised by the construction of the processing chambers1,893
- H10P 72/0464Characterised by the construction of the transfer chamber993
- H10P 72/0466Characterised by the construction of the load-lock chamber936
- H10P 72/0461Characterised by the presence of two or more transfer chambers673
Recent patents
- Storage and transfer module and substrate treatment apparatus including storage and transfer module29 Sep 2026US 12,748,355 B2Semes Co., Ltd.
- Container, container partition plate, substrate processing system, and substrate transfer method29 Sep 2026US 12,751,241 B2Tokyo Electron Limited
- Substrate processing method and substrate processing apparatus22 Sep 2026US 12,745,586 B2Ebara Corporation
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Information processing system, power adjustment method, and heat treatment apparatus22 Sep 2026US 12,745,589 B2Tokyo Electron Limited
- Substrate Processing System and Substrate Transfer Method8 Oct 2026US 2026/0310186 A1Tokyo Electron Limited
- Semiconductor Thermal Processing Apparatus and Method for Transferring Workpieces by Carrier Device Thereof8 Oct 2026US 2026/0314307 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Substrate processing apparatus and substrate processing method8 Oct 2026US 2026/0314316 A1SCREEN Holdings Co., Ltd.
- Apparatus for processing substrate and method of transferring substrate8 Oct 2026US 2026/0314331 A1Tokyo Electron Limited
- Method to improve interconnect coefficient of thermal expansion8 Oct 2026US 2026/0314357 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Multi-chamber integrated process system988US 4,951,601 AAPPLIED Materials.Inc. · 1990
- Ultra high throughput wafer vacuum processing system973US 5,855,681 AAPPLIED Materials.Inc. · 1999
- Compartnetalized substrate processing chamber732US 5,730,801 AAPPLIED Materials.Inc. · 1998
- Staged-vacuum wafer processing system and method701US 5,186,718 AAPPLIED Materials.Inc. · 1993
- Wafer processing cluster tool batch preheating and degassing apparatus663US 5,259,881 AMaterials Research Corporation · 1993