Storage and transfer module and substrate treatment apparatus including storage and transfer module

A substrate treatment apparatus comprising:

• a loading port including a substrate loading portion in which a substrate is disposed;
• a buffer module including a frame and a plurality of buffers disposed in the frame, the plurality of buffers arranged in a vertical direction;
• and
• a storage and transfer module that comprises:
• a module body,
• a pair of storage and transfer units disposed in the module body, each of the pair of storage and transfer units including a liftable transfer portion, and a storage portion disposed on the outside of the liftable transfer portion, the storage portion of each of the pair of storage and transfer units having a storage space therein, and
• a transfer target portion in which a substrate is transferred by the transfer portion,
• wherein the pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween,
• the substrate loading portion is disposed on one side of each of the pair of storage and transfer units
• the pair of storage and transfer units are disposed in a first row in one direction, and
• the storage portion of each of the pair of storage and transfer units is disposed on an opposite outer side of each of the pair of storage and transfer units to be aligned in the first row with the pair of storage and transfer units,
• the substrate loading portion includes at least two mounting tables,
• the at least two mounting tables are disposed to be spaced apart from each other in a second row in the vertical direction,
• in each of the pair of storage and transfer units, a partition wall is disposed between the liftable transfer portion and the storage portion such that the liftable transfer portion and the storage portion are respectively disposed in spaces that are partitioned and closed off from one other by the partition wall, and
• an outer wall of each of the storage unit of the pair of storage and transfer unit that is opposite to the partition wall sits flush against an outer-most boundary of a substrate treatment apparatus in which the storage and transfer module is installed along with at least two other modules of the substrate treatment apparatus.

A substrate treatment apparatus comprising:

• a loading port including a cassette in which a substrate is accommodated, and a plurality of mounting tables on which the cassette is loaded;
• a heat treatment chamber portion including a baking chamber and a plurality of heating plates disposed in the baking chamber, the plurality of heating plates stacked in a vertical direction;
• a buffer module including a frame and a plurality of buffers disposed in the frame, the plurality of buffers arranged in the vertical direction;
• and
• a storage and transfer module that comprises:
• a module body,
• a pair of storage and transfer units disposed in the module body, each of the pair of storage and transfer units including a liftable transfer portion, and a storage portion disposed on the outside of the liftable transfer portion, the storage portion of each of the pair of storage and transfer units having a storage space therein, and
• a transfer target portion in which a substrate is transferred by the transfer portion,
• wherein the pair of storage and transfer units are disposed to oppose each other with the transfer target portion interposed therebetween,
• one of the plurality of mounting tables is disposed on one side of each of the pair of storage and transfer units such that each of the plurality of mounting tables respectively oppose each of the pair of storage and transfer units,
• the plurality of mounting tables are disposed in a row in the vertical direction,
• in the storage space of each of the pair of storage and transfer units, a plurality of support plates are disposed in multiple stages in the vertical direction and at least one treatment liquid container is supported on each of the support plates,
• one of the buffer module and the heat treatment chamber portion is selectively disposed in the transfer target portion
• in each of the pair of storage and transfer units, a partition wall is disposed between the liftable transfer portion and the storage portion such that the liftable transfer portion and the storage portion are respectively disposed in spaces that are partitioned and closed off from one other by the partition wall, and
• an outer wall of each of the storage unit of the pair of storage and transfer unit that is opposite to the partition wall sits flush against an outer-most boundary of a substrate treatment apparatus in which the storage and transfer module is installed along with at least two other modules of the substrate treatment apparatus.