Container, container partition plate, substrate processing system, and substrate transfer method

A system of processing a substrate comprising:

• a vacuum processing chamber configured to provide a processing space where a consumable is disposed and the substrate is processed;
• a container configured to accommodate the consumable or the substrate;
• an arm disposed on a transfer path between the vacuum processing chamber and the container, and configured to transfer the consumable or the substrate;
• a detector including a light emitting part disposed at a first end of a pick connected to a tip end of the arm and a light receiving part connected to a second end of the pick;
• and
• a controller configured to control the detector to detect a thickness of a component in the container and to stop a transfer of the substrate by the arm when the detected thickness exceeds a threshold, wherein
• the container includes
• multiple holding portions configured to respectively accommodate the consumable, each of which is loaded and unloaded in one direction,
• a partition plate including a first portion formed to be disposed between the light emitting part and the light receiving part, the partition plate being accommodated in one of the multiple holding portions, and
• a fixer configured to fix the container so that the consumable is arranged on the transfer path to be loaded into and unloaded from the multiple holding portions, and
• a thickness of the partition plate is equal to or greater than the threshold.