H01J 37/3222
Antennas
Official title: {Antennas}
H01J37/3222 (Antennas) appears on 290 US grants and 390 published applications in this corpus.
Search patents in H01J- Granted patents
- 290
- Published applications
- 390
- Assignees
- 121
- Inventors
- 764
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 3 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 3 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 6 | 0 |
| 1994 | 1 | 0 |
| 1995 | 5 | 0 |
| 1996 | 6 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 3 | 0 |
| 2000 | 5 | 0 |
| 2001 | 6 | 2 |
| 2002 | 5 | 2 |
| 2003 | 2 | 6 |
| 2004 | 4 | 10 |
| 2005 | 6 | 7 |
| 2006 | 2 | 8 |
| 2007 | 2 | 8 |
| 2008 | 3 | 7 |
| 2009 | 4 | 13 |
| 2010 | 4 | 12 |
| 2011 | 7 | 15 |
| 2012 | 3 | 19 |
| 2013 | 6 | 15 |
| 2014 | 12 | 16 |
| 2015 | 10 | 35 |
| 2016 | 18 | 19 |
| 2017 | 15 | 21 |
| 2018 | 13 | 22 |
| 2019 | 18 | 19 |
| 2020 | 18 | 18 |
| 2021 | 13 | 19 |
| 2022 | 12 | 19 |
| 2023 | 9 | 20 |
| 2024 | 21 | 22 |
| 2025 | 16 | 20 |
| 2026 | 9 | 16 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Plasma showerhead assembly and method of reducing defects29 Sep 2026US 12,747,502 B2APPLIED Materials.Inc.
- Antenna unit and substrate treating apparatus including the same4 Aug 2026US 12,701,649 B2Semes Co., Ltd.
- Plasma processing apparatus21 Jul 2026US 12,689,004 B2The University of Shiga Prefecture
- Microwave treatment device30 Jun 2026US 12,671,060 B2Muegge GmbH
- Treatment chamber with modular microwave power delivery30 Jun 2026US 12,671,061 B2APPLIED Materials.Inc.
- Plasma Processing Device and Plasma Measuring Method2 Jul 2026US 2026/0188631 A1Tokyo Electron Limited
- Substrate treating apparatus18 Jun 2026US 2026/0171362 A1Samsung Electronics Co., Ltd.
- A microwave plasma reactor with a plurality of emitters and absorbers and a method for plasma processing a workpiece using such a microwave plasma reactor18 Jun 2026US 2026/0171365 A1
- Thermal solutions for high frequency and high power transmission11 Jun 2026US 2026/0162935 A1APPLIED Materials.Inc.
- Plasma processing apparatus and plasma processing method11 Jun 2026US 2026/0162940 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Plasma processing method and film forming method509US 7,771,796 B2Tokyo Electron Limited · 2010
- Plasma processing apparatus435US 5,698,036 ATokyo Electron Limited · 1997
- Surface wave plasma processing system and method of using337US 7,138,767 B2Tokyo Electron Limited · 2006
- Plasma deposited coatings, and low temperature plasma method of making same289US 4,737,379 AEnergy Conversion Devices, Inc. · 1988
- Silicon scavenger in an inductively coupled RF plasma reactor249US 5,556,501 AAPPLIED Materials.Inc. · 1996