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US 12,671,061 B2Granted
Treatment chamber with modular microwave power delivery
AssigneeApplied Materials, Inc.
InventorsTimothy Joseph Franklin, Sajad Yazdani, Kostiantyn Achkasov, Xue Yang Chang
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Abstract
Embodiments disclosed herein include a source array. In an example, a source array includes a dielectric plate having a surface. A plurality of resonators is on the surface of the dielectric plate. The source array also includes a plurality of power amplifiers. Each one of the plurality of power amplifiers is coupled to a corresponding one of the plurality of resonators.
Claims20
A source array, comprising:
- a dielectric plate having a surface;
- a plurality of resonators on the surface of the dielectric plate;
- and
- a plurality of power amplifiers, each one of the plurality of power amplifiers coupled to a corresponding one of the plurality of resonators, wherein each one of the power amplifiers overlaps the corresponding one of the plurality of resonators in a plan view perspective, and wherein a first portion of the plurality of power amplifiers is oriented along a first direction, and a second portion of the plurality of power amplifiers is oriented along a second direction orthogonal to the first direction.
1 more element
A processing tool, comprising:
- a treatment chamber;
- a substrate or wafer processing region within the treatment chamber;
- and
- a source array above the substrate or wafer processing region, the source array comprising:
- a dielectric plate having a surface;
- a plurality of resonators on the surface of the dielectric plate;
- and
- a plurality of power amplifiers, each one of the plurality of power amplifiers coupled to a corresponding one of the plurality of resonators, wherein each one of the power amplifiers overlaps the corresponding one of the plurality of resonators in a plan view perspective, and wherein a first portion of the plurality of power amplifiers is oriented along a first direction, and a second portion of the plurality of power amplifiers is oriented along a second direction orthogonal to the first direction.
5 more elements
A method of operating a source array, the method comprising:
- providing power to a plurality of power amplifiers, each one of the plurality of power amplifiers coupled to a corresponding one of a plurality of resonators, wherein the plurality of resonators are on the surface of a dielectric plate, wherein each one of the power amplifiers overlaps the corresponding one of the plurality of resonators in a plan view perspective, and wherein a first portion of the plurality of power amplifiers is oriented along a first direction, and a second portion of the plurality of power amplifiers is oriented along a second direction orthogonal to the first direction.
Dependencies are inferred from the claim text.