Thermal solutions for high frequency and high power transmission
AssigneeApplied Materials, Inc.
InventorsADAM FISCHBACH, THAI CHENG CHUA
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to an apparatus that includes a housing, and a core within the housing. In an embodiment, a channel is set into an outer surface of the core, and a first hole passes through the core. In an embodiment, the apparatus further includes an inlet through the housing, where the inlet is fluidly coupled to the channel, and an outlet through the housing, where the outlet is fluidly coupled to the channel. In an embodiment, the apparatus further includes a dielectric plug within the first hole, where a second hole passes through the dielectric plug.
Claims20
An apparatus, comprising:
- a housing;
- a core within the housing, wherein a channel is set into an outer surface of the core, and wherein a first hole passes through the core;
- an inlet through the housing, wherein the inlet is fluidly coupled to the channel;
- an outlet through the housing, wherein the outlet is fluidly coupled to the channel;
- and
- a dielectric plug within the first hole, wherein a second hole passes through the dielectric plug.
An apparatus, comprising:
- an upper housing with an interior tube;
- a lower housing coupled to the upper housing, wherein the lower housing comprises an opening through the lower housing, wherein the interior tube passes through the opening, and wherein the upper housing and the lower housing define a channel around the interior tube;
- and
- a dielectric plug within the interior tube, wherein a hole passes through the dielectric plug.
An apparatus, comprising:
- a solid state high frequency power source;
- an applicator for propagating high frequency electromagnetic radiation from the solid state high frequency power source;
- and
- a thermal break coupled between the solid state high frequency power source and the applicator, wherein the thermal break comprises:
- a housing with a fluidic channel;
- a dielectric plug within the housing, wherein the dielectric plug is surrounded by the fluidic channel;
- and
- a metallic rod through the dielectric plug, wherein the metallic rod electrically couples the solid state high frequency power source to the applicator.
Dependencies are inferred from the claim text.