H01J 37/3002
Details
Official title: {Details}
H01J37/3002 (Details) appears on 873 US grants and 695 published applications in this corpus.
Search patents in H01J- Granted patents
- 873
- Published applications
- 695
- Assignees
- 270
- Inventors
- 1,484
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 6 | 0 |
| 1978 | 10 | 0 |
| 1979 | 14 | 0 |
| 1980 | 8 | 0 |
| 1981 | 7 | 0 |
| 1982 | 5 | 0 |
| 1983 | 6 | 0 |
| 1984 | 8 | 0 |
| 1985 | 11 | 0 |
| 1986 | 7 | 0 |
| 1987 | 19 | 0 |
| 1988 | 12 | 0 |
| 1989 | 15 | 0 |
| 1990 | 12 | 0 |
| 1991 | 15 | 0 |
| 1992 | 11 | 0 |
| 1993 | 2 | 0 |
| 1994 | 6 | 0 |
| 1995 | 14 | 0 |
| 1996 | 18 | 0 |
| 1997 | 13 | 0 |
| 1998 | 19 | 0 |
| 1999 | 12 | 0 |
| 2000 | 12 | 0 |
| 2001 | 8 | 3 |
| 2002 | 10 | 10 |
| 2003 | 12 | 8 |
| 2004 | 7 | 9 |
| 2005 | 10 | 9 |
| 2006 | 10 | 14 |
| 2007 | 5 | 18 |
| 2008 | 9 | 13 |
| 2009 | 19 | 14 |
| 2010 | 7 | 13 |
| 2011 | 10 | 18 |
| 2012 | 17 | 32 |
| 2013 | 27 | 37 |
| 2014 | 38 | 67 |
| 2015 | 64 | 63 |
| 2016 | 56 | 42 |
| 2017 | 49 | 45 |
| 2018 | 43 | 36 |
| 2019 | 32 | 34 |
| 2020 | 44 | 38 |
| 2021 | 30 | 35 |
| 2022 | 37 | 25 |
| 2023 | 24 | 25 |
| 2024 | 17 | 24 |
| 2025 | 19 | 28 |
| 2026 | 5 | 35 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Actively cooled gas line for ion source4 Aug 2026US 12,700,565 B2APPLIED Materials.Inc.
- Mixed-gas species plasma source system21 Apr 2026US 12,609,276 B2FEI Company
- Apparatus, system and method for energy spread ion beam31 Mar 2026US 12,592,359 B2APPLIED Materials.Inc.
- Gas feed device, system having a gas feed device, and particle beam apparatus having a gas feed device or the system3 Mar 2026US 12,564,869 B2Carl Zeiss Microscopy GmbH
- Differential pumping apparatus and focused charged particle beam system17 Feb 2026US 12,555,739 B2V Technology Co., Ltd.
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Focused ion beam system with single optical column17 Sep 2026US 2026/0279716 A1Ales Tech Inc.
- Mixed-gas species plasma source system10 Sep 2026US 2026/0269181 A1FEI Company
- Polarized light bright field imaging in charged particle beam systems27 Aug 2026US 2026/0253832 A1FEI Company
Most cited
By later US patents
- Electron beam inspection system and method266US 5,578,821 AKLA Instruments Corporation · 1996
- System and method for magnetic scanning, accelerating, and implanting of an ion beam122US 5,483,077 ANissin Electric Co., Ltd. · 1996
- Chamber with flow-through source102US 9,934,942 B1APPLIED Materials.Inc. · 2018
- Particle-optical systems and arrangements and particle-optical components for such systems and arrangements98US 7,244,949 B2Applied Materials Israel Ltd. · 2007
- Multilayered device micro etching method and system96US 5,055,696 AHitachi, Ltd. · 1991