Focused ion beam system with single optical column

A focused ion beam system with a single optical column, comprising:

• a vacuum chamber, having an inner space;
• an emitter, positioned in the inner space of the vacuum chamber;
• and
• a gas pressure control device, storing at least one gas and connected to a wall surface of the vacuum chamber;
• an optical column, positioned between the emitter and a sample;
• a voltage control module, electrically connected to the emitter and the optical column, generating an extraction voltage to the emitter, and generating a voltage to the optical column;
• and
• a signal control module, connected to the gas pressure control device and the voltage control module, the signal control module generating a gas import signal to the gas pressure control device so that the gas pressure control device introduces the at least one gas into the inner space of the vacuum chamber;
• wherein the signal control module adjusts the voltage from the voltage control module to the optical column, and adjusts the extraction voltage from the voltage control module to the emitter so that the emitter generates a heavy ion beam for processing or analyzing the sample, and a light ion beam for imaging the sample by the at least one gas;
• wherein the heavy ion beam for processing or analyzing the sample is generated by a first gas in the at least one gas and the light ion beam for imaging the sample is generated by a second gas in the at least one gas;
• wherein the molecular weight of the first gas is greater than the molecular weight of the second gas and the signal control module adjusts the extraction voltage according to the molecular properties of the first gas and the molecular properties of the second gas.