H01J 37/30
Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/30 (Electron-beam or ion-beam tubes for localised treatment of objects) appears on 7,056 US grants and 6,319 published applications in this corpus.
Search patents in H01J- Granted patents
- 7,056
- Published applications
- 6,319
- Assignees
- 1,190
- Inventors
- 8,585
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 23 | 0 |
| 1977 | 31 | 0 |
| 1978 | 37 | 0 |
| 1979 | 35 | 0 |
| 1980 | 25 | 0 |
| 1981 | 30 | 0 |
| 1982 | 26 | 0 |
| 1983 | 37 | 0 |
| 1984 | 56 | 0 |
| 1985 | 65 | 0 |
| 1986 | 48 | 0 |
| 1987 | 55 | 0 |
| 1988 | 57 | 0 |
| 1989 | 66 | 0 |
| 1990 | 57 | 0 |
| 1991 | 67 | 0 |
| 1992 | 84 | 0 |
| 1993 | 56 | 0 |
| 1994 | 81 | 0 |
| 1995 | 75 | 0 |
| 1996 | 62 | 0 |
| 1997 | 54 | 0 |
| 1998 | 112 | 0 |
| 1999 | 135 | 0 |
| 2000 | 132 | 0 |
| 2001 | 153 | 61 |
| 2002 | 161 | 193 |
| 2003 | 215 | 187 |
| 2004 | 204 | 216 |
| 2005 | 182 | 227 |
| 2006 | 210 | 258 |
| 2007 | 135 | 252 |
| 2008 | 194 | 300 |
| 2009 | 221 | 259 |
| 2010 | 225 | 258 |
| 2011 | 208 | 230 |
| 2012 | 219 | 246 |
| 2013 | 254 | 295 |
| 2014 | 292 | 319 |
| 2015 | 282 | 377 |
| 2016 | 300 | 289 |
| 2017 | 296 | 253 |
| 2018 | 226 | 232 |
| 2019 | 269 | 238 |
| 2020 | 257 | 280 |
| 2021 | 212 | 224 |
| 2022 | 197 | 225 |
| 2023 | 197 | 230 |
| 2024 | 153 | 237 |
| 2025 | 152 | 244 |
| 2026 | 136 | 189 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 37/317For changing properties of the objects or for applying thin layers thereon4,846
- H01J 37/305For casting, melting, evaporating, or etching1,329
- H01J 37/304Controlling tubes by information coming from the objects or from the beam1,317
- H01J 37/302Controlling tubes by external information970
- H01J 37/3002Details873
- H01J 37/31For cutting or drilling99
- H01J 37/301Arrangements enabling beams to pass between regions of different pressure52
- H01J 37/315For welding33
Recent patents
- Method for electron beam-induced processing of a defect of a microlithographic photomask6 Oct 2026US 12,754,470 B2Carl Zeiss SMT GmbH
- Charged particle beam writing apparatus, discharge detection method, and discharge detection apparatus6 Oct 2026US 12,755,930 B2NuFlare Technology, Inc.
- E-beam exposure method and mask manufacturing method comprising the same6 Oct 2026US 12,755,931 B2Samsung Electronics Co., Ltd.
- End point determination by means of contrast gas29 Sep 2026US 12,748,347 B2Carl Zeiss SMT GmbH
- Ion implanter and linear accelerator having polygonal backbone29 Sep 2026US 12,750,942 B2APPLIED Materials.Inc.
- Semiconductor apparatus and method of operating the same8 Oct 2026US 2026/0310069 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Ion generators of ion implanters with movable repeller8 Oct 2026US 2026/0311954 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Apparatus and method for repairing defect of semiconductor8 Oct 2026US 2026/0311964 A1Tokyo Electron Limited
- Method for fabricating superconducting qubits by focused ion beam annealing8 Oct 2026US 2026/0314268 A1Bmstu
Most cited
By later US patents
- Particle-optical projection system1,466US 7,388,217 B2IMS Nanofabrication GmbH · 2008
- Position measurement apparatus and method and pattern forming apparatus and writing method551US 7,640,142 B2NuFlare Technology, Inc. · 2009
- Neutral particle beam processing apparatus423US 6,861,642 B2Ebara Corporation · 2005
- Method and apparatus for target support in electron projection systems352US 3,983,401 AElectron Beam Microfabrication Corporation · 1976
- Beam processing apparatus350US 6,849,857 B2Ebara Corporation · 2005