H01J 37/304
Controlling tubes by information coming from the objects or from the beam
Official title: Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals
H01J37/304 (Controlling tubes by information coming from the objects or from the beam) appears on 1,317 US grants and 1,135 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,317
- Published applications
- 1,135
- Assignees
- 288
- Inventors
- 2,195
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 7 | 0 |
| 1978 | 12 | 0 |
| 1979 | 9 | 0 |
| 1980 | 6 | 0 |
| 1981 | 5 | 0 |
| 1982 | 12 | 0 |
| 1983 | 11 | 0 |
| 1984 | 14 | 0 |
| 1985 | 16 | 0 |
| 1986 | 13 | 0 |
| 1987 | 14 | 0 |
| 1988 | 11 | 0 |
| 1989 | 13 | 0 |
| 1990 | 4 | 0 |
| 1991 | 9 | 0 |
| 1992 | 12 | 0 |
| 1993 | 8 | 0 |
| 1994 | 10 | 0 |
| 1995 | 12 | 0 |
| 1996 | 10 | 0 |
| 1997 | 12 | 0 |
| 1998 | 23 | 0 |
| 1999 | 31 | 0 |
| 2000 | 25 | 0 |
| 2001 | 32 | 14 |
| 2002 | 29 | 43 |
| 2003 | 46 | 29 |
| 2004 | 43 | 44 |
| 2005 | 28 | 40 |
| 2006 | 35 | 48 |
| 2007 | 32 | 47 |
| 2008 | 47 | 66 |
| 2009 | 35 | 43 |
| 2010 | 46 | 34 |
| 2011 | 37 | 30 |
| 2012 | 32 | 21 |
| 2013 | 32 | 50 |
| 2014 | 46 | 43 |
| 2015 | 40 | 63 |
| 2016 | 50 | 59 |
| 2017 | 66 | 35 |
| 2018 | 42 | 41 |
| 2019 | 56 | 57 |
| 2020 | 44 | 42 |
| 2021 | 40 | 35 |
| 2022 | 31 | 41 |
| 2023 | 49 | 51 |
| 2024 | 28 | 46 |
| 2025 | 28 | 61 |
| 2026 | 23 | 52 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Charged particle beam writing apparatus, discharge detection method, and discharge detection apparatus6 Oct 2026US 12,755,930 B2NuFlare Technology, Inc.
- E-beam exposure method and mask manufacturing method comprising the same6 Oct 2026US 12,755,931 B2Samsung Electronics Co., Ltd.
- Method and apparatus for continuous chained energy ion implantation4 Aug 2026US 12,700,562 B2Axcelis Technologies, Inc.
- Optimizing image distortion in a multi beam charged particle processing apparatus28 Jul 2026US 12,695,055 B2IMS Nanofabrication GmbH
- Apparatus and techniques for substrate processing using independent ion source and radical source28 Jul 2026US 12,695,056 B2APPLIED Materials.Inc.
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Charged particle beam device and control method therefor1 Oct 2026US 2026/0302131 A1Hitachi, Ltd.
- Dose information correction method, dose information acquisition method for edge peripheral region of figure pattern, charged particle beam writing apparatus, and non-transitory computer-readable storage medium storing program1 Oct 2026US 2026/0302132 A1NuFlare Technology, Inc.
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
Most cited
By later US patents
- Particle-optical projection system1,466US 7,388,217 B2IMS Nanofabrication GmbH · 2008
- On-axis interferometric alignment of plates using the spatial phase of interference patterns174US 5,414,514 AMassachusetts Institute of Technology · 1995
- Closed-loop process control for electron beam freeform fabrication and deposition processes135US 8,452,073 B2The United States of America as represented by the Administrator of the National Aeronautics and Space Administration · 2013
- Method of manufacturing a component118US 10,052,712 B2ROLLS-ROYCE plc · 2018
- Multilayered device micro etching method and system96US 5,055,696 AHitachi, Ltd. · 1991