H01J 37/3045
Object or beam position registration
Official title: {Object or beam position registration}
H01J37/3045 (Object or beam position registration) appears on 514 US grants and 414 published applications in this corpus.
Search patents in H01J- Granted patents
- 514
- Published applications
- 414
- Assignees
- 152
- Inventors
- 936
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 3 | 0 |
| 1978 | 8 | 0 |
| 1979 | 4 | 0 |
| 1980 | 3 | 0 |
| 1981 | 4 | 0 |
| 1982 | 6 | 0 |
| 1983 | 7 | 0 |
| 1984 | 9 | 0 |
| 1985 | 6 | 0 |
| 1986 | 5 | 0 |
| 1987 | 3 | 0 |
| 1988 | 3 | 0 |
| 1989 | 10 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 9 | 0 |
| 1993 | 2 | 0 |
| 1994 | 7 | 0 |
| 1995 | 8 | 0 |
| 1996 | 6 | 0 |
| 1997 | 6 | 0 |
| 1998 | 8 | 0 |
| 1999 | 12 | 0 |
| 2000 | 12 | 0 |
| 2001 | 10 | 8 |
| 2002 | 13 | 20 |
| 2003 | 23 | 12 |
| 2004 | 16 | 19 |
| 2005 | 12 | 11 |
| 2006 | 10 | 9 |
| 2007 | 7 | 10 |
| 2008 | 11 | 15 |
| 2009 | 7 | 17 |
| 2010 | 11 | 14 |
| 2011 | 15 | 13 |
| 2012 | 13 | 12 |
| 2013 | 18 | 20 |
| 2014 | 21 | 16 |
| 2015 | 12 | 32 |
| 2016 | 20 | 25 |
| 2017 | 35 | 13 |
| 2018 | 15 | 10 |
| 2019 | 15 | 19 |
| 2020 | 17 | 12 |
| 2021 | 10 | 12 |
| 2022 | 12 | 16 |
| 2023 | 19 | 18 |
| 2024 | 8 | 17 |
| 2025 | 10 | 27 |
| 2026 | 8 | 17 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- 3D volume inspection method and method of configuring of a 3D volume inspection method30 Jun 2026US 12,670,570 B2Carl Zeiss SMT GmbH
- Alignment determination method and computer program23 Jun 2026US 12,665,164 B2ASML Netherlands B. V.
- Charged particle beam writing method and charged particle beam writing apparatus16 Jun 2026US 12,658,405 B2NuFlare Technology, Inc.
- Determining a position of an object in a beam apparatus16 Jun 2026US 12,658,406 B2Carl Zeiss Microscopy GmbH
- Multi charged particle beam writing method and multi charged particle beam writing apparatus21 Apr 2026US 12,609,278 B2NuFlare Technology, Inc.
- System and method for adjusting an ion beam10 Sep 2026US 2026/0269182 A1APPLIED Materials.Inc.
- Multi-charged particle beam irradiation apparatus and alignment method27 Aug 2026US 2026/0253836 A1NuFlare Technology, Inc.
- Charged particle beam writing apparatus, drift amount calculation method, and charged particle beam writing method20 Aug 2026US 2026/0245830 A1NuFlare Technology, Inc.
- Line edge smoothing with jittered twist13 Aug 2026US 2026/0237589 A1Axcelis Technologies, Inc.
- Charged particle beam writing method and charged particle beam writing apparatus6 Aug 2026US 2026/0229454 A1NuFlare Technology, Inc.
Most cited
By later US patents
- On-axis interferometric alignment of plates using the spatial phase of interference patterns174US 5,414,514 AMassachusetts Institute of Technology · 1995
- Electron beam exposure apparatus and method of controlling same80US 5,864,142 ACanon Kabushiki Kaisha · 1999
- Contrast enhancement of electron beam alignment marks75US 4,123,661 AHughes Aircraft Company · 1978
- Method of fabricating semiconductor circuit devices utilizing multiple exposures66US 6,159,644 AHitachi, Ltd. · 2000
- Electron beam writing method and system using large range deflection in combination with a continuously moving table65US 4,818,885 AInternational Business Machines Corporation · 1989