Determining a position of an object in a beam apparatus

A non-transitory computer readable medium containing software which is loadable into a processor unit and which, when executed, controls a beam apparatus, the software comprising:

• executable code that facilitates providing a predefinable region of an object and a marking in the beam apparatus, wherein the predefinable region has a first position in relation to the marking, the first position is given by a first distance and a second distance, the first distance being a distance between the predefinable region and a first straight line running through the marking and the second distance being a distance between the predefinable region and a second straight line running through the marking, wherein the first straight line and the second straight line are arranged at a first angle with respect to one another, the first angle being other than 0° and 180°;
• executable code that rotates the object arranged on an object holder using an object stage, on which the object holder is arranged, wherein the object stage is rotated about a first rotation axis and by a predefinable first rotation angle, wherein the first rotation axis is aligned at a second angle with respect to an axis of the beam apparatus, the second angle being other than 0° and 180° and/or rotating a capture device of the beam apparatus about a second rotation axis and by a predefinable second rotation angle;
• executable code that determines a further second distance between the predefinable region and the second straight line using the processor unit;
• and
• executable code that determines a second position of the predefinable region of the object in relation to the marking using the first distance, the second distance and the further second distance.

A beam apparatus for processing, imaging and/or analyzing an object, comprising

• a first beam generator that generates a first beam;
• a first objective lens that focuses the first beam on the object;
• at least one movable object stage that is used to arrange the object;
• at least one display device that displays an image of the object and/or an analysis regarding the object;
• at least one capture device that images the object;
• and
• at least one control unit having a processor unit that is coupled to a non-transitory computer readable medium containing software that includes executable code that facilitates providing a predefinable region of the object and a marking in the beam apparatus, wherein the predefinable region has a first position in relation to the marking, the first position is given by a first distance and a second distance, the first distance being a distance between the predefinable region and a first straight line running through the marking and the second distance being a distance between the predefinable region and a second straight line running through the marking, wherein the first straight line and the second straight line are arranged at a first angle with respect to one another, the first angle being other than 0° and 180°, executable code that rotates the object arranged on an object holder using an object stage, on which the object holder is arranged, wherein the object stage is rotated about a first rotation axis and by a predefinable first rotation angle, wherein the first rotation axis is aligned at a second angle with respect to an axis of the beam apparatus, the second angle being other than 0° and 180° and/or rotating a capture device of the beam apparatus about a second rotation axis and by a predefinable second rotation angle, executable code that determines a further second distance between the predefinable region and the second straight line using the processor unit, and executable code that determines a second position of the predefinable region of the object in relation to the marking using the first distance, the second distance and the further second distance.