H01J 37/3007
Electron or ion-optical systems
Official title: {Electron or ion-optical systems}
H01J37/3007 (Electron or ion-optical systems) appears on 478 US grants and 322 published applications in this corpus.
Search patents in H01J- Granted patents
- 478
- Published applications
- 322
- Assignees
- 171
- Inventors
- 750
- Latest grant
- 31 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 5 | 0 |
| 1978 | 8 | 0 |
| 1979 | 14 | 0 |
| 1980 | 7 | 0 |
| 1981 | 6 | 0 |
| 1982 | 5 | 0 |
| 1983 | 6 | 0 |
| 1984 | 8 | 0 |
| 1985 | 11 | 0 |
| 1986 | 5 | 0 |
| 1987 | 14 | 0 |
| 1988 | 6 | 0 |
| 1989 | 11 | 0 |
| 1990 | 11 | 0 |
| 1991 | 9 | 0 |
| 1992 | 6 | 0 |
| 1993 | 2 | 0 |
| 1994 | 5 | 0 |
| 1995 | 5 | 0 |
| 1996 | 6 | 0 |
| 1997 | 6 | 0 |
| 1998 | 16 | 0 |
| 1999 | 11 | 0 |
| 2000 | 9 | 0 |
| 2001 | 3 | 3 |
| 2002 | 5 | 5 |
| 2003 | 7 | 5 |
| 2004 | 4 | 5 |
| 2005 | 6 | 4 |
| 2006 | 6 | 6 |
| 2007 | 3 | 12 |
| 2008 | 7 | 7 |
| 2009 | 11 | 7 |
| 2010 | 5 | 6 |
| 2011 | 5 | 5 |
| 2012 | 5 | 15 |
| 2013 | 15 | 22 |
| 2014 | 18 | 29 |
| 2015 | 34 | 35 |
| 2016 | 28 | 15 |
| 2017 | 17 | 17 |
| 2018 | 18 | 14 |
| 2019 | 10 | 14 |
| 2020 | 17 | 15 |
| 2021 | 16 | 16 |
| 2022 | 13 | 13 |
| 2023 | 15 | 8 |
| 2024 | 8 | 10 |
| 2025 | 7 | 17 |
| 2026 | 2 | 17 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Apparatus, system and method for energy spread ion beam31 Mar 2026US 12,592,359 B2APPLIED Materials.Inc.
- Differential pumping apparatus and focused charged particle beam system17 Feb 2026US 12,555,739 B2V Technology Co., Ltd.
- Stage apparatus and charged particle beam apparatus including stage apparatus11 Nov 2025US 12,469,671 B2Hitachi High-Tech Corporation
- Method of assembling drift tube assemblies in ion implantors30 Sep 2025US 12,431,329 B2Applied Materials, Inc.
- System and method for uniform ion milling15 Jul 2025US 12,362,130 B2E. A. Fischione Instruments, Inc.
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Focused ion beam system with single optical column17 Sep 2026US 2026/0279716 A1Ales Tech Inc.
- Polarized light bright field imaging in charged particle beam systems27 Aug 2026US 2026/0253832 A1FEI Company
- Composite Beam Apparatus13 Aug 2026US 2026/0237598 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- System and method for magnetic scanning, accelerating, and implanting of an ion beam122US 5,483,077 ANissin Electric Co., Ltd. · 1996
- Particle-optical systems and arrangements and particle-optical components for such systems and arrangements98US 7,244,949 B2Applied Materials Israel Ltd. · 2007
- System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions89US 5,311,028 ANissin Electric Co., Ltd. · 1994
- Pattern inspection apparatus and electron beam apparatus86US 5,557,105 AFujitsu Limited · 1996
- Lithographic apparatus for the production of microstructures82US 4,724,328 ASiemens Aktiengesellschaft · 1988