Back to results
US 12,469,671 B2Granted
Stage apparatus and charged particle beam apparatus including stage apparatus
AssigneeHitachi High-Tech Corporation
InventorsAkira Nishioka, Motohiro Takahashi, Masaki Mizuochi, Yasuhiro Ando, Raifu Yamamoto
Life of this patent
Estimating the term…
Abstract
A stage apparatus includes a lower stage that moves in a Y-axis direction, an upper stage that floats from the lower stage and moves at least in an X-axis direction orthogonal to the Y-axis direction, a heat exchanger that cools a Y table of the lower stage with a refrigerant, and a control device that controls an inclination of the lower stage with reference to the Y table cooled by the heat exchanger.
Claims14
A stage apparatus comprising:
- a first stage configured to move in a first direction;
- a second stage configured to float from the first stage and move in a second direction orthogonal to at least the first direction;
- a first cooling unit configured to cool a table of the first stage with a refrigerant;
- and
- a control device configured to control an inclination of the second stage with reference to the table of the first stage cooled by the first cooling unit.
2 more elements
Dependencies are inferred from the claim text.