H01J 37/06
Electron sources
Official title: Electron sources; Electron guns
H01J37/06 (Electron sources) appears on 1,035 US grants and 958 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,035
- Published applications
- 958
- Assignees
- 386
- Inventors
- 1,883
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 12 | 0 |
| 1977 | 14 | 0 |
| 1978 | 6 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 6 | 0 |
| 1983 | 6 | 0 |
| 1984 | 10 | 0 |
| 1985 | 3 | 0 |
| 1986 | 9 | 0 |
| 1987 | 8 | 0 |
| 1988 | 9 | 0 |
| 1989 | 11 | 0 |
| 1990 | 11 | 0 |
| 1991 | 12 | 0 |
| 1992 | 11 | 0 |
| 1993 | 8 | 0 |
| 1994 | 5 | 0 |
| 1995 | 2 | 0 |
| 1996 | 8 | 0 |
| 1997 | 7 | 0 |
| 1998 | 9 | 0 |
| 1999 | 12 | 0 |
| 2000 | 5 | 0 |
| 2001 | 13 | 6 |
| 2002 | 18 | 15 |
| 2003 | 15 | 15 |
| 2004 | 19 | 29 |
| 2005 | 18 | 24 |
| 2006 | 25 | 20 |
| 2007 | 20 | 29 |
| 2008 | 25 | 36 |
| 2009 | 16 | 28 |
| 2010 | 29 | 36 |
| 2011 | 28 | 29 |
| 2012 | 24 | 22 |
| 2013 | 26 | 31 |
| 2014 | 43 | 36 |
| 2015 | 32 | 52 |
| 2016 | 47 | 47 |
| 2017 | 49 | 45 |
| 2018 | 57 | 47 |
| 2019 | 36 | 58 |
| 2020 | 77 | 65 |
| 2021 | 38 | 53 |
| 2022 | 51 | 51 |
| 2023 | 35 | 53 |
| 2024 | 45 | 48 |
| 2025 | 43 | 49 |
| 2026 | 19 | 34 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 37/073Electron guns using field emission, photo emission, or secondary emission electron sources417
- H01J 37/065Construction of guns or parts thereof208
- H01J 37/063Geometrical arrangement of electrodes for beam-forming126
- H01J 37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or67
- H01J 37/07Eliminating deleterious effects due to thermal effects or electric or magnetic fields42
- H01J 37/077Electron guns using discharge in gases or vapours as electron sources42
- H01J 37/067Replacing parts of guns41
- H01J 37/061Electron guns using electron multiplication4
Recent patents
- Charged particle gun and charged particle beam apparatus29 Sep 2026US 12,749,643 B2Hitachi High-Tech Corporation
- Electron beam applicator and creation method of detection data in electron beam applicator15 Sep 2026US 12,738,441 B2Photo electron Soul Inc.
- Hybrid background extraction in electron holography15 Sep 2026US 12,738,444 B2FEI Company
- Light emitting sealed body, light emitting unit, and light source device1 Sep 2026US 12,725,764 B2Energetiq Technology, Inc.
- Electron beam irradiation device18 Aug 2026US 12,712,143 B2Nhv Corporation
- Multi-Mode Radio Frequency Cavity1 Oct 2026US 2026/0302123 A1Board of Trustees of Michigan State University
- Charged particle beam device and deposition method17 Sep 2026US 2026/0279725 A1Kioxia Corporation
- Electron emission apparatus and electronic apparatus10 Sep 2026US 2026/0269164 A1Westlake University
- Adaptive illumination for a dual beam system10 Sep 2026US 2026/0269178 A1FEI Company
- Applied electron beam device and electron beam generation method3 Sep 2026US 2026/0260838 A1Hitachi High-Tech Corporation
Most cited
By later US patents
- Laser stimulated high current density photoelectron generator and method of manufacture235US 4,460,831 AThermo Electron Corporation · 1984
- Large-area uniform electron source137US 5,003,178 AElectron Vision Corporation · 1991
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Apparatus for generating a plurality of beamlets112US 7,129,502 B2Mapper Lithography IP B.V. · 2006
- Electron beam device with single crystal window and expansion-matched anode95US 5,612,588 AAmerican International Technologies, Inc. · 1997