H01J 37/063
Geometrical arrangement of electrodes for beam-forming
H01J37/063 (Geometrical arrangement of electrodes for beam-forming) appears on 126 US grants and 115 published applications in this corpus.
Search patents in H01J- Granted patents
- 126
- Published applications
- 115
- Assignees
- 73
- Inventors
- 253
- Latest grant
- 2 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 4 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 1 | 2 |
| 2003 | 2 | 0 |
| 2004 | 2 | 4 |
| 2005 | 1 | 1 |
| 2006 | 5 | 1 |
| 2007 | 0 | 4 |
| 2008 | 6 | 5 |
| 2009 | 1 | 6 |
| 2010 | 2 | 6 |
| 2011 | 8 | 7 |
| 2012 | 6 | 3 |
| 2013 | 5 | 1 |
| 2014 | 4 | 4 |
| 2015 | 3 | 1 |
| 2016 | 1 | 7 |
| 2017 | 7 | 8 |
| 2018 | 5 | 3 |
| 2019 | 4 | 8 |
| 2020 | 8 | 10 |
| 2021 | 5 | 7 |
| 2022 | 12 | 8 |
| 2023 | 7 | 6 |
| 2024 | 3 | 5 |
| 2025 | 6 | 5 |
| 2026 | 4 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Apparatus for generating a plurality of beamlets112US 7,129,502 B2Mapper Lithography IP B.V. · 2006
- Ion implantation with charge neutralization72US 6,271,529 B1Ebara Corporation · 2001
- Process and apparatus for converged fine line electron beam treatment of objects67US 4,382,186 AEnergy Sciences Inc. · 1983
- Illumination system for electron beam lithography tool63US 6,333,508 B1Elith LLC · 2001
- Electron beam unit for heat treatment by electron bombardment technique27US 4,058,697 A1977