Electron beam irradiation device

Abstract

This electron beam irradiation device comprises: an acceleration tube (13) formed by providing, side by side in an axial direction (L1), a plurality of acceleration electrodes for generating an electric field for accelerating an electron beam; and a plurality of shield rings (40) which are provided side by side in the axial direction (L1) so as to form a pair with the acceleration electrodes on the radial outside of the acceleration tube (13), and which are formed by being electrically connected respectively to the acceleration electrodes that form the pair therewith. In addition, the electron beam irradiation device comprises a conductive shield member (50) which surrounds the radial outside of a ring group (40G) composed of the plurality of shield rings (40). The shield member (50) surrounds at least a portion in the axial direction (L1) in the ring group (40G).

Dependencies are inferred from the claim text.