Wire or rod shaped extraction electrode optics
AssigneeAxcelis Technologies, Inc.
InventorsNeil Colvin, Paul Silverstein, Joshua Abeshaus
Life of this patent
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AssigneeAxcelis Technologies, Inc.
InventorsNeil Colvin, Paul Silverstein, Joshua Abeshaus
Estimating the term…
An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined shape to define an optical region that is associated with the base plate aperture. An electrical coupling electrically connects to the plurality of electrode rods and is configured to electrically connect to an electrical potential. The plurality of electrode rods have a predetermined shape configured to define a path of a charged particle passing between the plurality of electrode rods based on the electrical potential. The plurality of electrode rods can define a suppressor or ground electrode downstream of an extraction aperture of an ion source.
An electrode apparatus for an ion implantation system, the electrode apparatus comprising:
An electrode assembly for controlling an ion beam in an ion implantation system, the electrode assembly comprising:
Dependencies are inferred from the claim text.