Electron beam applicator and creation method of detection data in electron beam applicator

A creation method of detection data in an electron beam applicator, wherein the electron beam applicator includes

• at least one light source,
• a photocathode configured to generate releasable electrons in response to receiving an excitation light beam emitted from the light source,
• an anode configured to form an electric field between the photocathode and the anode and extract the releasable electrons by the formed electric field to form an electron beam,
• a detector configured to detect an emitted substance emitted from an irradiation target irradiated with the electron beam and generate a detection signal, and
• a control unit,
• the creation method of detection data comprising:
• a step of setting two or more irradiation regions to be irradiated with an electron beam in the irradiation target in one detection data creation operation;
• an electron beam forming step of forming two or more pulsed electron beams by emitting two or more excitation light beams from the light source to the photocathode, the two or more excitation light beams being pulsed and being set to be received by the photocathode at different timings;
• an electron beam irradiation step of irradiating different irradiation regions selected from the set two or more irradiation regions with the two or more pulsed electron beams, respectively;
• a detection step of detecting, at different timings by the detector, pulsed emitted substances emitted from the different irradiation regions in response to irradiation with the two or more pulsed electron beams and generating detection signals;
• and
• a detection data output step of outputting the generated detection signals in association with position information on the different irradiation regions,
• wherein the number of detectors is less than the number of electron beams emitted to the irradiation targets.