Charged particle gun and charged particle beam apparatus

A charged particle gun comprising:

• a charged particle source that generates a charged particle;
• an electrode portion that includes an extraction electrode for extracting a charged particle beam from the charged particle source;
• a voltage introduction unit that introduces voltage to the electrode portion;
• and
• a temperature adjustment unit that adjusts a temperature of the electrode portion, wherein
• the temperature adjustment unit is configured to adjust the temperature of the electrode portion based on a change in a state of the electrode portion,
• wherein the temperature adjustment unit
• includes a detection unit for optically detecting a temperature distribution of the electrode portion, and
• adjusts the temperature of the electrode portion according to a detection result of the detection unit.

A charged particle gun comprising:

• a charged particle source that generates a charged particle;
• an electrode portion that includes an extraction electrode for extracting a charged particle beam from the charged particle source;
• a voltage introduction unit that introduces voltage to the electrode portion;
• and
• a temperature adjustment unit that adjusts a temperature of the electrode portion;
• and
• a strain gauge that measures an amount of strain in the extraction electrode, wherein
• the temperature adjustment unit is configured to adjust the temperature of the electrode portion based on a change in a state of the electrode portion, and
• the temperature adjustment unit adjusts the temperature of the extraction electrode according to the amount of strain.

A charged particle gun comprising:

• a charged particle source that generates a charged particle;
• an electrode portion that includes an extraction electrode for extracting a charged particle beam from the charged particle source;
• a voltage introduction unit that introduces voltage to the electrode portion;
• and
• a temperature adjustment unit that adjusts a temperature of the electrode portion,
• wherein the temperature adjustment unit is configured to adjust the temperature of the electrode portion based on a change in a state of the electrode portion, and
• wherein the temperature adjustment unit is placed outside the extraction electrode.