H01J 37/075
Electron guns using thermionic emission from cathodes heated by particle bombardment or
Official title: Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
H01J37/075 (Electron guns using thermionic emission from cathodes heated by particle bombardment or) appears on 67 US grants and 72 published applications in this corpus.
Search patents in H01J- Granted patents
- 67
- Published applications
- 72
- Assignees
- 56
- Inventors
- 205
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
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| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 3 | 2 |
| 2003 | 0 | 0 |
| 2004 | 3 | 1 |
| 2005 | 0 | 0 |
| 2006 | 1 | 0 |
| 2007 | 1 | 1 |
| 2008 | 0 | 2 |
| 2009 | 1 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 0 | 1 |
| 2013 | 2 | 2 |
| 2014 | 2 | 3 |
| 2015 | 4 | 4 |
| 2016 | 3 | 2 |
| 2017 | 0 | 2 |
| 2018 | 2 | 3 |
| 2019 | 1 | 6 |
| 2020 | 10 | 4 |
| 2021 | 3 | 7 |
| 2022 | 6 | 7 |
| 2023 | 2 | 11 |
| 2024 | 9 | 4 |
| 2025 | 6 | 4 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
- Multiple beam electron beam lithography system88US 6,429,443 B1APPLIED Materials.Inc. · 2002
- Inspection system by charged particle beam and method of manufacturing devices using the system41US 7,601,972 B2Ebara Corporation · 2009
- Inspection system by charged particle beam and method of manufacturing devices using the system35US 7,135,676 B2Ebara Corporation · 2006
- Electron sources utilizing patterned negative electron affinity photocathodes17US 5,932,966 AIntevac, Inc. · 1999
- Inspection system by charged particle beam and method of manufacturing devices using the system16US 7,297,949 B2Ebara Corporation · 2007