Charged particle beam source
AssigneeFEI Company
InventorsKun Liu, Steven J. Randolph
Life of this patent
Estimating the term…
Abstract
A charged particle beam source, such as for use in an electron microscope, can include a mounting member defining a first opening at a free end of the mounting member and a bore extending from the first opening into the mounting member along a longitudinal axis of the mounting member. A second opening can be defined in a side wall of the mounting member and can extend between an outer surface of the mounting member and the bore, the second opening being spaced apart from the first opening along the longitudinal axis of the mounting member. An emitter member can be received in the bore and aligned along the longitudinal axis of the mounting member. A fixative material can be received in the bore and in the second opening to retain the emitter member in the bore.
Claims20
A charged particle beam source, comprising:
- a mounting member coupled to and extending from a curved, electrically conductive hairpin member, the mounting member defining a first opening at a free end of the mounting member and a bore extending from the first opening into the mounting member along a longitudinal axis of the mounting member;
- a second opening defined in a side wall of the mounting member and extending between an outer surface of the mounting member and the bore, the second opening being spaced apart from the first opening along the longitudinal axis of the mounting member;
- an emitter member received in the bore and aligned along the longitudinal axis of the mounting member;
- and
- a fixative material received in the bore and in the second opening to retain the emitter member in the bore.
A charged particle beam source, comprising:
- a curved hairpin member comprising an electrically conductive material;
- a mounting member coupled to and extending from an apex of the hairpin member such that a longitudinal axis of the mounting member is aligned with the apex of the curved hairpin member, the mounting member further comprising a free end portion;
- a bore defined in the mounting member and extending along the longitudinal axis of the mounting member, the bore comprising an opening at the free end portion of the mounting member;
- an emitter member received in the bore and aligned along the longitudinal axis of the mounting member;
- a fixative material layer that coats interior surfaces of the bore and extends around and covers the emitter member in the bore;
- wherein the emitter member comprises lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6), the mounting member comprises tungsten, the fixative material comprises graphite, and the graphite fixative material and the tungsten mounting member are welded together to secure the emitter member in the bore.
A charged particle beam source, comprising:
- a curved hairpin member comprising an electrically conductive material;
- a mounting member coupled to and extending from an apex of the hairpin member and defining an opening at a free end of the mounting member, the mounting member further comprising a bore extending from the opening into the mounting member along a longitudinal axis of the mounting member;
- an emitter member received in the bore and aligned along the longitudinal axis of the mounting member;
- and
- a fixative material received in the bore to retain the emitter member in the bore;
- wherein the emitter member comprises lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6), the mounting member comprises tungsten, the fixative material comprises graphite, and the graphite fixative material and the tungsten mounting member are welded together to secure the emitter member in the bore;
- and
- wherein the emitter member is not clamped by the mounting member.
Dependencies are inferred from the claim text.