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US 2026/0045440 A1Published application
Creation of electron beams using a micro-deflector array
OwnerXinrong Jiang, Alan D. Brodieinventors
Life of this patent
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Abstract
A gun lens receives an electron beam or other particle beam, which is then divided into beamlets by an aperture array. Each of the beamlets is telecentric. A global imaging lens receives the beamlets from the aperture array. A micro deflector array on a plane of the global imaging lens includes deflectors configured to be individually controlled.
Claims20
A system comprising:
- an electron beam source configured to generate an electron beam;
- a gun lens disposed in a path of the electron beam;
- an aperture array that divides the electron beam into a plurality of beamlets, wherein each of the beamlets is telecentric;
- a global imaging lens that receives the beamlets from the aperture array;
- and
- a micro deflector array disposed on a plane of the global imaging lens, wherein the micro deflector array includes a plurality of deflectors configured to be individually controlled.
3 more elements
A method comprising:
- generating a charged particle beam using a charged particle beam source;
- directing the charged particle beam through a gun lens;
- directing the charged particle beam through an aperture array thereby dividing the particle beam into a plurality of beamlets, wherein each of the beamlets is telecentric, and wherein the aperture array is downstream of the gun lens relative to a path of the particle beam;
- directing the beamlets through a global imaging lens;
- and
- deflecting the beamlets using a micro deflector array disposed on a plane of the global imaging lens, wherein the micro deflector array includes a plurality of deflectors configured to be individually controlled.
3 more elements
Dependencies are inferred from the claim text.